基于直接激光干涉图样声光过程发射的激光表面纹理质量监测与维护

IF 3.4 3区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY
Tobias Steege, Frederic Schell, Adrian Belkin, Christoph Zwahr, Andrés F. Lasagni
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引用次数: 0

摘要

直接激光干涉图案(DLIP)是一种很有前途的制造大面积周期性表面结构的技术,但由于激光功率的波动,控制工艺质量是一项挑战。本研究提出了一种新的监测方法,利用声学和光学发射来诊断和纠正DLIP结构制造过程中的这些波动。利用纳秒脉冲红外激光在不锈钢表面制备了6 μm周期微结构。随着时间的推移,观察到显著的激光功率波动,导致明显的表面纹理不均匀跨越更大的区域。通过麦克风和光电二极管分别记录的声发射和光发射与局部结构深度、表面粗糙度和纹理表面的宏观外观有很好的相关性。在处理过程中,采用PI控制器根据声发射反馈在18-22 kHz范围内调节激光功率,演示了一种过程中校正策略。实现该闭环控制系统可以实现2 μm结构深度一致的均匀纹理,而没有控制器的情况下,纹理在0.8和2.4 μm之间存在显著变化。这种监测和控制方法为确保大面积DLIP制造过程的质量和一致性提供了一种简单、经济的解决方案,有可能提高表面纹理应用的可靠性和效率。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Monitoring and Maintaining Laser Surface Texture Quality Based on Acoustic and Optical Process Emissions during Direct Laser Interference Patterning

Monitoring and Maintaining Laser Surface Texture Quality Based on Acoustic and Optical Process Emissions during Direct Laser Interference Patterning

Direct laser interference patterning (DLIP) is a promising technique for fabricating periodic surface structures on large areas, but controlling process quality can be challenging due to laser power fluctuations. This study presents a novel monitoring approach using acoustic and optical emissions to diagnose and correct these fluctuations during DLIP structure fabrication. Experiments are conducted using a nanosecond-pulsed IR laser to create 6 μm periodic microstructures on stainless steel. Significant laser power fluctuations are observed over time, resulting in noticeable surface texture inhomogeneity across larger areas. Acoustic and optical emissions, recorded via microphone and photodiodes respectively, are found to correlate well with local structure depth, surface roughness, and macroscopic appearance of the textured surface. A strategy for in-process correction is demonstrated using a PI controller to adjust laser power based on acoustic emission feedback in the 18–22 kHz range during processing. Implementing this closed-loop control system achieves a homogeneous texture with a consistent 2 μm structure depth, compared to significant variations between 0.8 and 2.4 μm without the controller. This monitoring and control approach offers a simple, cost-effective solution for ensuring quality and consistency in large-area DLIP fabrication processes, potentially improving the reliability and efficiency of surface texturing applications.

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来源期刊
Advanced Engineering Materials
Advanced Engineering Materials 工程技术-材料科学:综合
CiteScore
5.70
自引率
5.60%
发文量
544
审稿时长
1.7 months
期刊介绍: Advanced Engineering Materials is the membership journal of three leading European Materials Societies - German Materials Society/DGM, - French Materials Society/SF2M, - Swiss Materials Federation/SVMT.
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