TRANSFERLESS soft-lithography for the fabrication of peristaltic micropump with dome-shape membrane

This paper reports a new technique for fabricating a polydimethylsiloxane (PDMS)-based peristaltic electromagnetic (EM) micropump with a dome-shaped membrane structure. The membrane was intended to allow a high rate of fluid sample transport. A new and effective soft-lithography process without the transfer of mold structures is introduced, which is used for forming dome-shaped membranes, microfluidic channels, and pump chambers. This technique includes four main steps, membrane fabrication, pattern of the first and second PDMS mold, removal of the photoresist inside the channel and finally attachment of the EM coils. The coating properties and surface quality were analyzed using scanning electron microscopy (SEM). The results showed that the membrane and channels was formed properly without any leakage. The fabricated actuator was functionally tested to determine the performances of the micropump. Polymer-based microfluidic pump systems have potential applications in precisely injection of microfluidic samples in artificial kidney and smart insulin drug delivery system.