利用超快光脉冲在集成系统中选择性夹钳和固定胶体粒子进行三维微加工

IF 3.7 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY
Krishangi Krishna, Jieliyue Sun, Wenyu Liu, Robert H. Hurt, Kimani C. Toussaint Jr.
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引用次数: 0

摘要

使用纳米到微米尺寸的构建块的微加工在下一代电子学,光电子学和先进材料中具有巨大的应用潜力。然而,化学气相沉积和分子束外延等传统方法需要高度控制的环境和专用设备,限制了可扩展性和精度。为了解决这些挑战,提出了一种用于选择性镊子和固定胶体(STIC)的单激光平台,该平台将粒子操作、组装和稳定集成在一个系统中。STIC利用超低功率的飞秒激光对胶体进行精确的、无接触的光学操作,而不会损坏材料。在更高的功率下,同样的激光可以使双光子聚合(TPP)安全地将胶体固定在预定的位置。使用STIC,演示了从介电珠到过渡金属二硫化物(TMDs,例如MoS2)的图案排列的3D结构的组装。此外,还采用了tpp制造的手柄作为中间支撑,大大提高了tmd的光镊效率。单激光设计消除了双激光系统的需要,简化了光学对准,减少了热损伤,提高了效率。此外,研究表明,STIC支持直接多光子成像在制造过程中的原位检测。这项工作为高精度微结构制造建立了一个通用的、可扩展的光学平台,为克服当前微纳米制造的局限性提供了一条途径。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Harnessing Ultrafast Optical Pulses for 3D Microfabrication by Selective Tweezing and Immobilization of Colloidal Particles in an Integrated System

Harnessing Ultrafast Optical Pulses for 3D Microfabrication by Selective Tweezing and Immobilization of Colloidal Particles in an Integrated System

Microfabrication using nano- to micron-sized building blocks holds a great potential for applications in next-generation electronics, optoelectronics, and advanced materials. However, traditional methods like chemical vapor deposition and molecular beam epitaxy require highly controlled environments and specialized equipment, limiting scalability and precision. To address these challenges, a single-laser platform is presented for selective tweezing and immobilization of colloids (STIC) that integrates particle manipulation, assembly, and stabilization in one system. STIC utilizes a femtosecond laser at ultra-low power for precise, contact-free optical manipulation of colloids without material damage. At higher power, the same laser enables two-photon polymerization (TPP) to immobilize colloids securely in their intended positions. Using STIC, the assembly of 3D structures from dielectric beads to patterned arrangements of transition metal dichalcogenides (TMDs e.g., MoS2) is demonstrated. Also a TPP-fabricated handle as an intermediate support is incorporated which significantly enhances the optical tweezing efficiency of TMDs. The single-laser design eliminates the need for dual-laser systems, simplifying optical alignment, reducing heat damage, and improving efficiency. Additionally, it is shown that STIC supports direct multiphoton imaging for in situ inspection during fabrication. This work establishes a versatile, scalable optical platform for high-precision microstructure fabrication, offering a pathway to overcome current limitations in micro- and nanomanufacturing.

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