全角MEMS陀螺仪刚度非线性的在线模式匹配方法

IF 4.3 2区综合性期刊 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Sensors Journal Pub Date : 2025-03-26 DOI:10.1109/JSEN.2025.3548851

Sheng Yu;Ying Ouyang;Mingze Gao;Jun Feng;Yuchen Wang;Jiangkun Sun;Yongmeng Zhang;Dingbang Xiao;Xuezhong Wu

{"title":"全角MEMS陀螺仪刚度非线性的在线模式匹配方法","authors":"Sheng Yu;Ying Ouyang;Mingze Gao;Jun Feng;Yuchen Wang;Jiangkun Sun;Yongmeng Zhang;Dingbang Xiao;Xuezhong Wu","doi":"10.1109/JSEN.2025.3548851","DOIUrl":null,"url":null,"abstract":"In the whole-angle MEMS gyroscopes, the aniso-stiffness induces a mismatch of the resonant modes and engenders undesired frequency split. The stiffness nonlinearity caused by electrostatic actuation will exacerbate such a mismatch. The model of the stiffness error established in this article demonstrates that the electrostatic stiffness nonlinearity brings an extra 4th harmonic component to the frequency and quadrature control force for the whole-angle MEMS gyroscopes. To improve the performance of the gyroscope, an online mode-matching method based on virtual rotation is proposed to mitigate the impact of both aniso-stiffness and stiffness nonlinearities. Experimental results show that with the self-calibration method, the gyroscope can achieve mode matching with the frequency split of below 1 mHz across the full temperature range from <inline-formula> <tex-math>$- 40~^{\\circ }$ </tex-math></inline-formula> C to <inline-formula> <tex-math>$60~^{\\circ }$ </tex-math></inline-formula> C.","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":"25 9","pages":"14740-14748"},"PeriodicalIF":4.3000,"publicationDate":"2025-03-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Online Mode-Matching Method Countering for Stiffness Nonlinearity in Whole-Angle MEMS Gyroscope\",\"authors\":\"Sheng Yu;Ying Ouyang;Mingze Gao;Jun Feng;Yuchen Wang;Jiangkun Sun;Yongmeng Zhang;Dingbang Xiao;Xuezhong Wu\",\"doi\":\"10.1109/JSEN.2025.3548851\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In the whole-angle MEMS gyroscopes, the aniso-stiffness induces a mismatch of the resonant modes and engenders undesired frequency split. The stiffness nonlinearity caused by electrostatic actuation will exacerbate such a mismatch. The model of the stiffness error established in this article demonstrates that the electrostatic stiffness nonlinearity brings an extra 4th harmonic component to the frequency and quadrature control force for the whole-angle MEMS gyroscopes. To improve the performance of the gyroscope, an online mode-matching method based on virtual rotation is proposed to mitigate the impact of both aniso-stiffness and stiffness nonlinearities. Experimental results show that with the self-calibration method, the gyroscope can achieve mode matching with the frequency split of below 1 mHz across the full temperature range from <inline-formula> <tex-math>$- 40~^{\\\\circ }$ </tex-math></inline-formula> C to <inline-formula> <tex-math>$60~^{\\\\circ }$ </tex-math></inline-formula> C.\",\"PeriodicalId\":447,\"journal\":{\"name\":\"IEEE Sensors Journal\",\"volume\":\"25 9\",\"pages\":\"14740-14748\"},\"PeriodicalIF\":4.3000,\"publicationDate\":\"2025-03-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Sensors Journal\",\"FirstCategoryId\":\"103\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/10938217/\",\"RegionNum\":2,\"RegionCategory\":\"综合性期刊\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Sensors Journal","FirstCategoryId":"103","ListUrlMain":"https://ieeexplore.ieee.org/document/10938217/","RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}

引用次数: 0

摘要

在全角MEMS陀螺仪中，各向异性刚度导致了谐振模式的不匹配，并产生了不期望的频率分裂。静电驱动引起的刚度非线性将加剧这种不匹配。本文建立的刚度误差模型表明，静电刚度非线性给全角MEMS陀螺仪的频率和正交控制力带来了额外的四次谐波分量。为了提高陀螺仪的性能，提出了一种基于虚拟旋转的在线模式匹配方法，以减轻八角刚度和刚度非线性的影响。实验结果表明，在$- 40~^{\circ}$ C至$60~^{\circ}$ C的整个温度范围内，采用自校准方法，陀螺仪可以实现低于1 mHz的频率分割模式匹配。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Online Mode-Matching Method Countering for Stiffness Nonlinearity in Whole-Angle MEMS Gyroscope

In the whole-angle MEMS gyroscopes, the aniso-stiffness induces a mismatch of the resonant modes and engenders undesired frequency split. The stiffness nonlinearity caused by electrostatic actuation will exacerbate such a mismatch. The model of the stiffness error established in this article demonstrates that the electrostatic stiffness nonlinearity brings an extra 4th harmonic component to the frequency and quadrature control force for the whole-angle MEMS gyroscopes. To improve the performance of the gyroscope, an online mode-matching method based on virtual rotation is proposed to mitigate the impact of both aniso-stiffness and stiffness nonlinearities. Experimental results show that with the self-calibration method, the gyroscope can achieve mode matching with the frequency split of below 1 mHz across the full temperature range from

$- 40~^{\circ }$

C to

$60~^{\circ }$

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

IEEE Sensors Journal 工程技术-工程：电子与电气

CiteScore

7.70

自引率

14.00%

发文量

2058

审稿时长

5.2 months

期刊介绍： The fields of interest of the IEEE Sensors Journal are the theory, design , fabrication, manufacturing and applications of devices for sensing and transducing physical, chemical and biological phenomena, with emphasis on the electronics and physics aspect of sensors and integrated sensors-actuators. IEEE Sensors Journal deals with the following: -Sensor Phenomenology, Modelling, and Evaluation -Sensor Materials, Processing, and Fabrication -Chemical and Gas Sensors -Microfluidics and Biosensors -Optical Sensors -Physical Sensors: Temperature, Mechanical, Magnetic, and others -Acoustic and Ultrasonic Sensors -Sensor Packaging -Sensor Networks -Sensor Applications -Sensor Systems: Signals, Processing, and Interfaces -Actuators and Sensor Power Systems -Sensor Signal Processing for high precision and stability (amplification, filtering, linearization, modulation/demodulation) and under harsh conditions (EMC, radiation, humidity, temperature); energy consumption/harvesting -Sensor Data Processing (soft computing with sensor data, e.g., pattern recognition, machine learning, evolutionary computation; sensor data fusion, processing of wave e.g., electromagnetic and acoustic; and non-wave, e.g., chemical, gravity, particle, thermal, radiative and non-radiative sensor data, detection, estimation and classification based on sensor data) -Sensors in Industrial Practice