采用脉冲直流PECVD外加阴极沉积dlc -石墨烯的电化学行为

IF 4.3 3区材料科学 Q2 MATERIALS SCIENCE, COATINGS & FILMS

Diamond and Related Materials Pub Date : 2025-05-02 DOI:10.1016/j.diamond.2025.112397

Funsho Olaitan Kolawole , Lais Gimenes Vernasqui , Elver Juan de Dios Mitma Pillaca , William Alex da Silva Magalhães , Shola Kolade Kolawole , Evaldo José Corat , Vladimir Jesus Trava-Airoldi

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引用次数: 0

摘要

采用脉冲直流等离子体增强化学气相沉积技术（PECVD）和附加阴极系统制备了石墨烯类金刚石（dlc -石墨烯）薄膜。利用扫描电镜、拉曼光谱、四点探针和循环伏安法研究了石墨烯掺入和衬底偏置电压对dlc -石墨烯薄膜微观结构、结构完整性、电学和电化学性能的影响。石墨烯夹杂物导致DLC表面出现石墨烯颗粒。喇曼光谱显示，由于衬底偏置电压的增加，ID/IG从0.64上升到1.51。随着衬底偏置电压的升高，电阻率从34.62 MΩ/m2下降到89 kΩ/m2。石墨烯的加入提高了DLC薄膜的电化学活性和可逆性。研究了石墨烯掺入对DLC薄膜电学和电化学性能的影响，并获得了在1.0 kV （0.1 mg/mL石墨烯）和1.5 kV （0.5 mg/mL石墨烯）两种不同条件下沉积DLC-石墨烯的最佳性能。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

Electrochemical behavior of DLC-graphene deposited using a pulsed-DC PECVD with an additional cathode

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Electrochemical behavior of DLC-graphene deposited using a pulsed-DC PECVD with an additional cathode

Graphene incorporated diamond-like carbon (DLC-graphene) films were deposited using pulsed-DC plasma enhanced chemical vapor deposition (PECVD) with an additional cathode system. The effect of graphene incorporation and substrate bias voltage on the microstructure, structural integrity, electrical and electrochemical properties of the DLC-graphene films were investigated by scanning electron microscopy, Raman spectroscopy, a Four-point probe, and in operando Raman spectroscopy during cyclic voltammetry. Graphene inclusion leads to graphene particles on the DLC surface. The Raman spectra show a rise in I_D/I_G from 0.64 to 1.51 because of an increase in the substrate bias voltage. The electrical resistivity decreased from 34.62 MΩ/m² to 89 kΩ/m² as the substrate bias voltage increased. Incorporating graphene improved the electrochemical activity and reversibility of DLC films. The effect of graphene incorporation on the electrical and electrochemical properties of the DLC films were also investigated and the best behavior was obtained for DLC-graphene deposited for two (2) different conditions at bias voltages of 1.0 kV (0.1 mg/mL graphene) and 1.5 kV (0.5 mg/mL graphene).

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来源期刊

Diamond and Related Materials 工程技术-材料科学：综合

CiteScore

6.00

自引率

14.60%

发文量

702

审稿时长

2.1 months

期刊介绍： DRM is a leading international journal that publishes new fundamental and applied research on all forms of diamond, the integration of diamond with other advanced materials and development of technologies exploiting diamond. The synthesis, characterization and processing of single crystal diamond, polycrystalline films, nanodiamond powders and heterostructures with other advanced materials are encouraged topics for technical and review articles. In addition to diamond, the journal publishes manuscripts on the synthesis, characterization and application of other related materials including diamond-like carbons, carbon nanotubes, graphene, and boron and carbon nitrides. Articles are sought on the chemical functionalization of diamond and related materials as well as their use in electrochemistry, energy storage and conversion, chemical and biological sensing, imaging, thermal management, photonic and quantum applications, electron emission and electronic devices. The International Conference on Diamond and Carbon Materials has evolved into the largest and most well attended forum in the field of diamond, providing a forum to showcase the latest results in the science and technology of diamond and other carbon materials such as carbon nanotubes, graphene, and diamond-like carbon. Run annually in association with Diamond and Related Materials the conference provides junior and established researchers the opportunity to exchange the latest results ranging from fundamental physical and chemical concepts to applied research focusing on the next generation carbon-based devices.