飞秒激光在空气和液体介质中烧蚀硅的拉曼光谱表征

IF 6.3 2区材料科学 Q2 CHEMISTRY, PHYSICAL

Applied Surface Science Pub Date : 2025-04-25 DOI:10.1016/j.apsusc.2025.163258

Melika Afshar, Jaspreet Walia, Pierre Berini, Fabio Variola, Ravi Bhardwaj

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引用次数: 0

摘要

材料的激光烧蚀主要是在环境空气中进行的，导致高精度的局部形态和结构变化，并在表面产生一些碎屑的再沉积。虽然材料在液体介质中的烧蚀可以减少热损伤和碎片，但流体性质会影响材料的形态和结构变化。本文利用拉曼光谱研究了单飞秒激光脉冲在硅（100）中浸没在水、异丙醇和甘油中引起的结构变化，并与空气中高斯光束和涡旋光束携带轨道角动量的变化进行了比较。结果表明，激光作用后的再结晶程度在空气中更高。在液体中，激光修饰区显示出更大比例的多晶和非晶相。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

Raman spectroscopic characterization of femtosecond Laser ablation of Silicon in air and liquid medium

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Raman spectroscopic characterization of femtosecond Laser ablation of Silicon in air and liquid medium

Laser ablation of materials is mostly conducted in ambient air leading to high precision localized morphological and structural changes along with some redeposition of debris on the surface. While material ablation in a liquid medium can reduce thermal damage and debris, the fluid properties can influence morphological and structural changes. In this article, using Raman spectroscopy, we study structural changes induced by a single femtosecond laser pulse in silicon (100) immersed in water, isopropanol and glycerin and compare with air for a Gaussian and vortex beam carrying orbital angular momentum. We show that the extent of recrystallization after laser interaction is higher in air. In liquids, the laser modified regions exhibited greater percentage of poly-crystalline and amorphous phases.

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来源期刊

Applied Surface Science 工程技术-材料科学：膜

CiteScore

12.50

自引率

7.50%

发文量

3393

审稿时长

67 days

期刊介绍： Applied Surface Science covers topics contributing to a better understanding of surfaces, interfaces, nanostructures and their applications. The journal is concerned with scientific research on the atomic and molecular level of material properties determined with specific surface analytical techniques and/or computational methods, as well as the processing of such structures.