{"title":"种子层退火对Cu种子层沉积Pt/Co/Pt三层薄膜垂直磁各向异性的影响","authors":"Jeongjun Kim;Joonghoe Dho","doi":"10.1109/TMAG.2025.3552816","DOIUrl":null,"url":null,"abstract":"Pt/Co/Pt trilayers with perpendicular magnetic anisotropy (PMA) were deposited onto Si substrates with Cu seed layers, which were thermally annealed at various temperatures to alter their surface roughness. Annealing at temperatures up to <inline-formula> <tex-math>$475~^{\\circ }$ </tex-math></inline-formula>C induced significant grain growth in the 5 nm thick Cu seed layer, substantially increasing its surface roughness. At <inline-formula> <tex-math>$500~^{\\circ }$ </tex-math></inline-formula>C, the root-mean-square (rms) roughness of the Cu seed layer surpassed the 0.8 nm thickness of the Co layer, potentially disrupting its continuity. This increased surface roughness created pinning sites that significantly enhanced coercivity—up to approximately 430% compared to the as-deposited trilayer—by impeding domain wall motion. However, the excessive roughness at <inline-formula> <tex-math>$500~^{\\circ }$ </tex-math></inline-formula>C weakened ferromagnetic exchange interactions between Co spins, diminishing PMA and coercivity. Magnetic domain images revealed that the increasing Cu layer roughness promoted the formation of new domain nucleation sites while reducing domain wall velocity. These findings demonstrate that the perpendicular magnetic properties of the Pt/Co/Pt layer can be controlled by the microstructural characteristics of the underlying seed layer.","PeriodicalId":13405,"journal":{"name":"IEEE Transactions on Magnetics","volume":"61 5","pages":"1-5"},"PeriodicalIF":2.1000,"publicationDate":"2025-03-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Effect of Seed Layer Annealing on Perpendicular Magnetic Anisotropy in Pt/Co/Pt Trilayers Deposited on Si Substrates With Cu Seed Layers\",\"authors\":\"Jeongjun Kim;Joonghoe Dho\",\"doi\":\"10.1109/TMAG.2025.3552816\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Pt/Co/Pt trilayers with perpendicular magnetic anisotropy (PMA) were deposited onto Si substrates with Cu seed layers, which were thermally annealed at various temperatures to alter their surface roughness. Annealing at temperatures up to <inline-formula> <tex-math>$475~^{\\\\circ }$ </tex-math></inline-formula>C induced significant grain growth in the 5 nm thick Cu seed layer, substantially increasing its surface roughness. At <inline-formula> <tex-math>$500~^{\\\\circ }$ </tex-math></inline-formula>C, the root-mean-square (rms) roughness of the Cu seed layer surpassed the 0.8 nm thickness of the Co layer, potentially disrupting its continuity. This increased surface roughness created pinning sites that significantly enhanced coercivity—up to approximately 430% compared to the as-deposited trilayer—by impeding domain wall motion. However, the excessive roughness at <inline-formula> <tex-math>$500~^{\\\\circ }$ </tex-math></inline-formula>C weakened ferromagnetic exchange interactions between Co spins, diminishing PMA and coercivity. Magnetic domain images revealed that the increasing Cu layer roughness promoted the formation of new domain nucleation sites while reducing domain wall velocity. These findings demonstrate that the perpendicular magnetic properties of the Pt/Co/Pt layer can be controlled by the microstructural characteristics of the underlying seed layer.\",\"PeriodicalId\":13405,\"journal\":{\"name\":\"IEEE Transactions on Magnetics\",\"volume\":\"61 5\",\"pages\":\"1-5\"},\"PeriodicalIF\":2.1000,\"publicationDate\":\"2025-03-19\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Transactions on Magnetics\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/10934015/\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Transactions on Magnetics","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/10934015/","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Effect of Seed Layer Annealing on Perpendicular Magnetic Anisotropy in Pt/Co/Pt Trilayers Deposited on Si Substrates With Cu Seed Layers
Pt/Co/Pt trilayers with perpendicular magnetic anisotropy (PMA) were deposited onto Si substrates with Cu seed layers, which were thermally annealed at various temperatures to alter their surface roughness. Annealing at temperatures up to $475~^{\circ }$ C induced significant grain growth in the 5 nm thick Cu seed layer, substantially increasing its surface roughness. At $500~^{\circ }$ C, the root-mean-square (rms) roughness of the Cu seed layer surpassed the 0.8 nm thickness of the Co layer, potentially disrupting its continuity. This increased surface roughness created pinning sites that significantly enhanced coercivity—up to approximately 430% compared to the as-deposited trilayer—by impeding domain wall motion. However, the excessive roughness at $500~^{\circ }$ C weakened ferromagnetic exchange interactions between Co spins, diminishing PMA and coercivity. Magnetic domain images revealed that the increasing Cu layer roughness promoted the formation of new domain nucleation sites while reducing domain wall velocity. These findings demonstrate that the perpendicular magnetic properties of the Pt/Co/Pt layer can be controlled by the microstructural characteristics of the underlying seed layer.
期刊介绍:
Science and technology related to the basic physics and engineering of magnetism, magnetic materials, applied magnetics, magnetic devices, and magnetic data storage. The IEEE Transactions on Magnetics publishes scholarly articles of archival value as well as tutorial expositions and critical reviews of classical subjects and topics of current interest.