{"title":"用于微尺度检测的数字定向光束","authors":"Hiroshi Ohno","doi":"10.1007/s10043-025-00965-0","DOIUrl":null,"url":null,"abstract":"<p>A bundle of digitally directed beams, capable of instantaneously controlling their direction at every point within a field of view, is proposed for the inspection of microscale defects in manufacturing processes.</p>","PeriodicalId":722,"journal":{"name":"Optical Review","volume":"42 1","pages":""},"PeriodicalIF":1.1000,"publicationDate":"2025-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Digitally directed beams for microscale inspection\",\"authors\":\"Hiroshi Ohno\",\"doi\":\"10.1007/s10043-025-00965-0\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>A bundle of digitally directed beams, capable of instantaneously controlling their direction at every point within a field of view, is proposed for the inspection of microscale defects in manufacturing processes.</p>\",\"PeriodicalId\":722,\"journal\":{\"name\":\"Optical Review\",\"volume\":\"42 1\",\"pages\":\"\"},\"PeriodicalIF\":1.1000,\"publicationDate\":\"2025-04-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optical Review\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.1007/s10043-025-00965-0\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"OPTICS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Review","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1007/s10043-025-00965-0","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"OPTICS","Score":null,"Total":0}
Digitally directed beams for microscale inspection
A bundle of digitally directed beams, capable of instantaneously controlling their direction at every point within a field of view, is proposed for the inspection of microscale defects in manufacturing processes.
期刊介绍:
Optical Review is an international journal published by the Optical Society of Japan. The scope of the journal is:
General and physical optics;
Quantum optics and spectroscopy;
Information optics;
Photonics and optoelectronics;
Biomedical photonics and biological optics;
Lasers;
Nonlinear optics;
Optical systems and technologies;
Optical materials and manufacturing technologies;
Vision;
Infrared and short wavelength optics;
Cross-disciplinary areas such as environmental, energy, food, agriculture and space technologies;
Other optical methods and applications.