一种完全集成的双级绝对角度测量涡流传感器

IF 5.6 2区工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Transactions on Instrumentation and Measurement Pub Date : 2025-04-04 DOI:10.1109/TIM.2025.3557828

Bingyuan Wang;Xinquan Lai;Zhiwen Niu;Linxi Li

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引用次数: 0

摘要

本文介绍了一种基于涡流效应的全集成绝对角位置传感器。这种基于非凡磁铁检测的非接触式原理不受灰尘、油污和杂散磁铁的影响。该传感器通过印刷电路板上的两级线圈实现了更精确的绝对位置测量。由于采用了正交信道设计，利用比率测量原理，解调性能在振幅振动下也能保持稳定。可编程增益和偏移调整降低了对安装和制造工艺的要求。基于伪线性化的跟踪 ADC 实现了较高的转换速度。整个涡流传感器（ECS）采用 180 纳米工艺制造。转换器占硅面积为 14.45 平方毫米，在 5 V 电源下的功耗为 55 mA。测量结果证明，经过谐波补偿后，[0，360] 范围内的最大误差为 0.05°。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A Fully Integrated Eddy-Current Sensor With Dual Stages for Absolute Angle Measurement

This article presents a fully integrated absolute angular position sensor based on the eddy current effect. The noncontact principle based on extraordinary magnet detection is immune to dust, oil, and stray magnets. The sensor achieves a more accurate absolute position measurement by two-stage coils on the printed circuit board. Due to the orthogonal channel design, the demodulation performance is robust under amplitude vibration because of the ratiometric principle. Programmable gain and offset adjustment lessens the installation and manufacturing process requirements. The tracking ADC based on the pseudo-linearization achieves a high conversion speed. The whole eddy-current sensor (ECS) has been fabricated in the 180-nm process. The converter occupies 14.45-mm2 silicon area and consumes 55 mA under a 5-V supply. The measurement results prove that the maximum error is 0.05° within [0, 360] after harmonic compensation.

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来源期刊

IEEE Transactions on Instrumentation and Measurement 工程技术-工程：电子与电气

CiteScore

9.00

自引率

23.20%

发文量

1294

审稿时长

3.9 months

期刊介绍： Papers are sought that address innovative solutions to the development and use of electrical and electronic instruments and equipment to measure, monitor and/or record physical phenomena for the purpose of advancing measurement science, methods, functionality and applications. The scope of these papers may encompass: (1) theory, methodology, and practice of measurement; (2) design, development and evaluation of instrumentation and measurement systems and components used in generating, acquiring, conditioning and processing signals; (3) analysis, representation, display, and preservation of the information obtained from a set of measurements; and (4) scientific and technical support to establishment and maintenance of technical standards in the field of Instrumentation and Measurement.