基于激光诱导聚酰亚胺在相纸基体上碳化的可穿戴高灵敏度传感器

IF 4.1 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical Pub Date : 2025-04-18 DOI:10.1016/j.sna.2025.116592

Dezhao Wang , Shujun Ma , Qingkai Han , Xin Li , Shiliang Wang , Fan Yang , Chen Xue , Zhiwen Wang , Haocheng Zheng

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引用次数: 0

摘要

简化制造过程和降低生产成本对于开发高性能柔性传感器至关重要，特别是在可穿戴电子产品和健康监测方面的应用。本研究提出了一种简单、经济的制造柔性感光纸传感器的方法。将激光诱导碳化（LIC）工艺应用于粘贴在纸张表面的聚酰亚胺（PI）胶带上，以创建高灵敏度、快速响应、多参数柔性传感器，能够检测弯曲应变、压力和温度。采用LIC工艺生产的波纹碳膜作为功能传感材料，在纸表面刷涂导电银膏形成数字间电极。电极掩模是通过激光蚀刻PI磁带创建的。与商用应变片相比，该传感器具有更高的应变灵敏度（K≈187.5），具有较强的温度响应线性度（R²=0.97773），对微小压力变化具有超短的响应/恢复时间（480 ms/720 ms），具有可靠的重复性和稳定性。此外，该传感器在肢体运动检测、呼吸监测和触摸传感方面的可行性也得到了验证。

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Wearable and high-sensitivity sensor based on laser-induced carbonization of polyimide on photographic paper substrate

Simplifying manufacturing processes and reducing production costs are crucial for developing high-performance flexible sensors, especially for applications in wearable electronics and health monitoring. This study presents a straightforward, cost-effective method for fabricating a flexible, photographic paper-based sensor. A laser-induced carbonization (LIC) process is employed on polyimide (PI) tape affixed to the paper surface to create a high-sensitivity, fast-response, multi-parameter flexible sensor capable of detecting bending strain, pressure, and temperature. The corrugated carbon film produced by the LIC process serves as the functional sensing material, while interdigital electrodes are formed by brush-coating conductive silver paste on the paper surface. Electrode masks are created by laser etching the PI tape. The fabricated LIC Paper-Based Sensor demonstrates superior strain sensitivity (K≈187.5) compared to commercial strain gauges, exhibits strong temperature response linearity (R²=0.97773), and shows ultra-short response/recovery times (480 ms/720 ms) to minor pressure changes, with reliable repeatability and stability. Additionally, the sensor’s feasibility for limb movement detection, breathing monitoring, and touch sensing has been verified.

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来源期刊

Sensors and Actuators A-physical 工程技术-工程：电子与电气

CiteScore

8.10

自引率

6.50%

发文量

630

审稿时长

49 days

期刊介绍： Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas: • Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results. • Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon. • Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays. • Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers. Etc...