Haotian Wang , Xuli Cheng , Yuhao Wang , Yingtao Yang , Yuan Xue , Zhitang Song , Sannian Song , Lijun Tian , Wei Ren
{"title":"基于ga2se3的Ovonic阈值开关选择器,用于高密度内存应用","authors":"Haotian Wang , Xuli Cheng , Yuhao Wang , Yingtao Yang , Yuan Xue , Zhitang Song , Sannian Song , Lijun Tian , Wei Ren","doi":"10.1016/j.vacuum.2025.114339","DOIUrl":null,"url":null,"abstract":"<div><div>The increasing demand for high-density and high-speed memory systems, driven by big data and artificial intelligence, presents significant challenges for current information storage architectures, particularly in 3D stacking technologies. Selector devices with low leakage current and high thermal stability remain a critical limitation. This study investigates Ga<sub>2</sub>Se<sub>3</sub> as a simple binary Ovonic Threshold Switching (OTS) material through advanced fabrication, characterization, and first-principles simulations. Our key findings demonstrate that Ga<sub>2</sub>Se<sub>3</sub> exhibits exceptional low leakage current (∼8 nA), thermal stability (up to 400 °C), excellent performance at dimensions as small as 60 nm, and fast switching speed (∼10 ns). These results, combined with insights into its electronic state localization and bonding characteristics, position Ga<sub>2</sub>Se<sub>3</sub> as a promising candidate for next-generation high-density storage and computing technologies.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"239 ","pages":"Article 114339"},"PeriodicalIF":3.8000,"publicationDate":"2025-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Ga2Se3-based Ovonic Threshold Switching selector for high-density memory applications\",\"authors\":\"Haotian Wang , Xuli Cheng , Yuhao Wang , Yingtao Yang , Yuan Xue , Zhitang Song , Sannian Song , Lijun Tian , Wei Ren\",\"doi\":\"10.1016/j.vacuum.2025.114339\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>The increasing demand for high-density and high-speed memory systems, driven by big data and artificial intelligence, presents significant challenges for current information storage architectures, particularly in 3D stacking technologies. Selector devices with low leakage current and high thermal stability remain a critical limitation. This study investigates Ga<sub>2</sub>Se<sub>3</sub> as a simple binary Ovonic Threshold Switching (OTS) material through advanced fabrication, characterization, and first-principles simulations. Our key findings demonstrate that Ga<sub>2</sub>Se<sub>3</sub> exhibits exceptional low leakage current (∼8 nA), thermal stability (up to 400 °C), excellent performance at dimensions as small as 60 nm, and fast switching speed (∼10 ns). These results, combined with insights into its electronic state localization and bonding characteristics, position Ga<sub>2</sub>Se<sub>3</sub> as a promising candidate for next-generation high-density storage and computing technologies.</div></div>\",\"PeriodicalId\":23559,\"journal\":{\"name\":\"Vacuum\",\"volume\":\"239 \",\"pages\":\"Article 114339\"},\"PeriodicalIF\":3.8000,\"publicationDate\":\"2025-04-17\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Vacuum\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0042207X2500329X\",\"RegionNum\":2,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Vacuum","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0042207X2500329X","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
Ga2Se3-based Ovonic Threshold Switching selector for high-density memory applications
The increasing demand for high-density and high-speed memory systems, driven by big data and artificial intelligence, presents significant challenges for current information storage architectures, particularly in 3D stacking technologies. Selector devices with low leakage current and high thermal stability remain a critical limitation. This study investigates Ga2Se3 as a simple binary Ovonic Threshold Switching (OTS) material through advanced fabrication, characterization, and first-principles simulations. Our key findings demonstrate that Ga2Se3 exhibits exceptional low leakage current (∼8 nA), thermal stability (up to 400 °C), excellent performance at dimensions as small as 60 nm, and fast switching speed (∼10 ns). These results, combined with insights into its electronic state localization and bonding characteristics, position Ga2Se3 as a promising candidate for next-generation high-density storage and computing technologies.
期刊介绍:
Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences.
A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below.
The scope of the journal includes:
1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes).
2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis.
3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification.
4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.