基于合金化策略的低TCR高稳定性银铂厚膜应变片

IF 4.3 2区 综合性期刊 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC
Peng Zhang;Fuxin Zhao;Disheng Qiang;Tingting Shen;Chenhe Shao;Kaibo Zhu;Wenlong Lv;Daoheng Sun;Qinnan Chen
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引用次数: 0

摘要

提高传感器在极端环境下的高温稳定性,同时降低制造复杂性和成本对传感器的发展至关重要。然而,目前的薄膜应变片往往难以同时实现低温电阻系数(TCR)和高热稳定性。本研究通过Ag和Pt掺杂制备了高温厚膜应变片(TFSG),并采用激光图板制作柔性掩模,采用叶片镀膜工艺制备敏感层,具有沉积快速、高效的优点。此外,在高温下形成Ag/Pt合金,提高了材料的耐温性和稳定性。Ag/Pt TFSG的TCR仅为191 ppm/°C,比Ag TFSG低10倍。在室温下,应变抗力的规范因子(GF)为1.25,相关系数为0.983,500- $\mu \varepsilon $应变下的响应时间为0.52 s。在$800~^{\circ }$温度下6 h后,电阻漂移率(DR)仅为0.18%/h, and the strain GF of Ag/Pt TFSG at $800~^{\circ }$ C is 1.75. These results show that Ag/Pt TFSG based on alloy strategy optimization has a higher upper temperature limit and stronger anti-interference ability than Ag TFSG, and can be applied to strain signal measurement in extreme environments up to $800~^{\circ }$ C.
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Silver–Platinum Thick-Film Strain Gauge With Low TCR and High Stability Based on Alloying Strategy
Enhancing the high-temperature stability of sensors for extreme environments while reducing manufacturing complexity and cost is crucial for sensor development. However, current thin-film strain gauges often struggle to achieve both low-temperature coefficient of resistance (TCR) and high thermal stability. This study developed a high-temperature thick-film strain gauge (TFSG) through Ag and Pt doping and used laser patterning to fabricate flexible masks, the sensitive layer was prepared by a blade-coating process, which offered the advantages of fast and efficient deposition. Furthermore, forming Ag/Pt alloys at high temperatures enhanced the material’s temperature resistance and stability. The TCR of Ag/Pt TFSG is only 191 ppm/°C, ten times lower than Ag TFSG’s. At room temperature, the gauge factor (GF) of strain-resistance is 1.25, the correlation coefficient is 0.983, and the response time under a 500- $\mu \varepsilon $ strain is 0.52 s. After 6 h at $800~^{\circ }$ C, the resistance drift rate (DR) is only 0.18%/h, and the strain GF of Ag/Pt TFSG at $800~^{\circ }$ C is 1.75. These results show that Ag/Pt TFSG based on alloy strategy optimization has a higher upper temperature limit and stronger anti-interference ability than Ag TFSG, and can be applied to strain signal measurement in extreme environments up to $800~^{\circ }$ C.
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来源期刊
IEEE Sensors Journal
IEEE Sensors Journal 工程技术-工程:电子与电气
CiteScore
7.70
自引率
14.00%
发文量
2058
审稿时长
5.2 months
期刊介绍: The fields of interest of the IEEE Sensors Journal are the theory, design , fabrication, manufacturing and applications of devices for sensing and transducing physical, chemical and biological phenomena, with emphasis on the electronics and physics aspect of sensors and integrated sensors-actuators. IEEE Sensors Journal deals with the following: -Sensor Phenomenology, Modelling, and Evaluation -Sensor Materials, Processing, and Fabrication -Chemical and Gas Sensors -Microfluidics and Biosensors -Optical Sensors -Physical Sensors: Temperature, Mechanical, Magnetic, and others -Acoustic and Ultrasonic Sensors -Sensor Packaging -Sensor Networks -Sensor Applications -Sensor Systems: Signals, Processing, and Interfaces -Actuators and Sensor Power Systems -Sensor Signal Processing for high precision and stability (amplification, filtering, linearization, modulation/demodulation) and under harsh conditions (EMC, radiation, humidity, temperature); energy consumption/harvesting -Sensor Data Processing (soft computing with sensor data, e.g., pattern recognition, machine learning, evolutionary computation; sensor data fusion, processing of wave e.g., electromagnetic and acoustic; and non-wave, e.g., chemical, gravity, particle, thermal, radiative and non-radiative sensor data, detection, estimation and classification based on sensor data) -Sensors in Industrial Practice
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