{"title":"基于合金化策略的低TCR高稳定性银铂厚膜应变片","authors":"Peng Zhang;Fuxin Zhao;Disheng Qiang;Tingting Shen;Chenhe Shao;Kaibo Zhu;Wenlong Lv;Daoheng Sun;Qinnan Chen","doi":"10.1109/JSEN.2025.3545624","DOIUrl":null,"url":null,"abstract":"Enhancing the high-temperature stability of sensors for extreme environments while reducing manufacturing complexity and cost is crucial for sensor development. However, current thin-film strain gauges often struggle to achieve both low-temperature coefficient of resistance (TCR) and high thermal stability. This study developed a high-temperature thick-film strain gauge (TFSG) through Ag and Pt doping and used laser patterning to fabricate flexible masks, the sensitive layer was prepared by a blade-coating process, which offered the advantages of fast and efficient deposition. Furthermore, forming Ag/Pt alloys at high temperatures enhanced the material’s temperature resistance and stability. The TCR of Ag/Pt TFSG is only 191 ppm/°C, ten times lower than Ag TFSG’s. At room temperature, the gauge factor (GF) of strain-resistance is 1.25, the correlation coefficient is 0.983, and the response time under a 500-<inline-formula> <tex-math>$\\mu \\varepsilon $ </tex-math></inline-formula> strain is 0.52 s. After 6 h at <inline-formula> <tex-math>$800~^{\\circ }$ </tex-math></inline-formula>C, the resistance drift rate (DR) is only 0.18%/h, and the strain GF of Ag/Pt TFSG at <inline-formula> <tex-math>$800~^{\\circ }$ </tex-math></inline-formula>C is 1.75. These results show that Ag/Pt TFSG based on alloy strategy optimization has a higher upper temperature limit and stronger anti-interference ability than Ag TFSG, and can be applied to strain signal measurement in extreme environments up to <inline-formula> <tex-math>$800~^{\\circ }$ </tex-math></inline-formula>C.","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":"25 8","pages":"12760-12767"},"PeriodicalIF":4.3000,"publicationDate":"2025-03-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Silver–Platinum Thick-Film Strain Gauge With Low TCR and High Stability Based on Alloying Strategy\",\"authors\":\"Peng Zhang;Fuxin Zhao;Disheng Qiang;Tingting Shen;Chenhe Shao;Kaibo Zhu;Wenlong Lv;Daoheng Sun;Qinnan Chen\",\"doi\":\"10.1109/JSEN.2025.3545624\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Enhancing the high-temperature stability of sensors for extreme environments while reducing manufacturing complexity and cost is crucial for sensor development. However, current thin-film strain gauges often struggle to achieve both low-temperature coefficient of resistance (TCR) and high thermal stability. This study developed a high-temperature thick-film strain gauge (TFSG) through Ag and Pt doping and used laser patterning to fabricate flexible masks, the sensitive layer was prepared by a blade-coating process, which offered the advantages of fast and efficient deposition. Furthermore, forming Ag/Pt alloys at high temperatures enhanced the material’s temperature resistance and stability. The TCR of Ag/Pt TFSG is only 191 ppm/°C, ten times lower than Ag TFSG’s. At room temperature, the gauge factor (GF) of strain-resistance is 1.25, the correlation coefficient is 0.983, and the response time under a 500-<inline-formula> <tex-math>$\\\\mu \\\\varepsilon $ </tex-math></inline-formula> strain is 0.52 s. After 6 h at <inline-formula> <tex-math>$800~^{\\\\circ }$ </tex-math></inline-formula>C, the resistance drift rate (DR) is only 0.18%/h, and the strain GF of Ag/Pt TFSG at <inline-formula> <tex-math>$800~^{\\\\circ }$ </tex-math></inline-formula>C is 1.75. These results show that Ag/Pt TFSG based on alloy strategy optimization has a higher upper temperature limit and stronger anti-interference ability than Ag TFSG, and can be applied to strain signal measurement in extreme environments up to <inline-formula> <tex-math>$800~^{\\\\circ }$ </tex-math></inline-formula>C.\",\"PeriodicalId\":447,\"journal\":{\"name\":\"IEEE Sensors Journal\",\"volume\":\"25 8\",\"pages\":\"12760-12767\"},\"PeriodicalIF\":4.3000,\"publicationDate\":\"2025-03-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Sensors Journal\",\"FirstCategoryId\":\"103\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/10909121/\",\"RegionNum\":2,\"RegionCategory\":\"综合性期刊\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Sensors Journal","FirstCategoryId":"103","ListUrlMain":"https://ieeexplore.ieee.org/document/10909121/","RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
摘要
提高传感器在极端环境下的高温稳定性,同时降低制造复杂性和成本对传感器的发展至关重要。然而,目前的薄膜应变片往往难以同时实现低温电阻系数(TCR)和高热稳定性。本研究通过Ag和Pt掺杂制备了高温厚膜应变片(TFSG),并采用激光图板制作柔性掩模,采用叶片镀膜工艺制备敏感层,具有沉积快速、高效的优点。此外,在高温下形成Ag/Pt合金,提高了材料的耐温性和稳定性。Ag/Pt TFSG的TCR仅为191 ppm/°C,比Ag TFSG低10倍。在室温下,应变抗力的规范因子(GF)为1.25,相关系数为0.983,500- $\mu \varepsilon $应变下的响应时间为0.52 s。在$800~^{\circ }$温度下6 h后,电阻漂移率(DR)仅为0.18%/h, and the strain GF of Ag/Pt TFSG at $800~^{\circ }$ C is 1.75. These results show that Ag/Pt TFSG based on alloy strategy optimization has a higher upper temperature limit and stronger anti-interference ability than Ag TFSG, and can be applied to strain signal measurement in extreme environments up to $800~^{\circ }$ C.
Silver–Platinum Thick-Film Strain Gauge With Low TCR and High Stability Based on Alloying Strategy
Enhancing the high-temperature stability of sensors for extreme environments while reducing manufacturing complexity and cost is crucial for sensor development. However, current thin-film strain gauges often struggle to achieve both low-temperature coefficient of resistance (TCR) and high thermal stability. This study developed a high-temperature thick-film strain gauge (TFSG) through Ag and Pt doping and used laser patterning to fabricate flexible masks, the sensitive layer was prepared by a blade-coating process, which offered the advantages of fast and efficient deposition. Furthermore, forming Ag/Pt alloys at high temperatures enhanced the material’s temperature resistance and stability. The TCR of Ag/Pt TFSG is only 191 ppm/°C, ten times lower than Ag TFSG’s. At room temperature, the gauge factor (GF) of strain-resistance is 1.25, the correlation coefficient is 0.983, and the response time under a 500-$\mu \varepsilon $ strain is 0.52 s. After 6 h at $800~^{\circ }$ C, the resistance drift rate (DR) is only 0.18%/h, and the strain GF of Ag/Pt TFSG at $800~^{\circ }$ C is 1.75. These results show that Ag/Pt TFSG based on alloy strategy optimization has a higher upper temperature limit and stronger anti-interference ability than Ag TFSG, and can be applied to strain signal measurement in extreme environments up to $800~^{\circ }$ C.
期刊介绍:
The fields of interest of the IEEE Sensors Journal are the theory, design , fabrication, manufacturing and applications of devices for sensing and transducing physical, chemical and biological phenomena, with emphasis on the electronics and physics aspect of sensors and integrated sensors-actuators. IEEE Sensors Journal deals with the following:
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-Sensors in Industrial Practice