具有环形数字间电极结构的超高Q铌酸锂谐振器

IF 4.3 2区综合性期刊 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Sensors Journal Pub Date : 2025-03-11 DOI:10.1109/JSEN.2025.3548093

Hangbing Xiao;Hui Chen;Yuxin Zhang;Yuxuan Wu;Haopeng Xu;Quan Yuan

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引用次数: 0

摘要

本文研究了一种具有环形数字间换能器（AIDT）结构的铌酸锂（LN）表面声波（SAW）谐振器。分析了该谐振器的基本工作原理和结构特点。由于电极结构的封闭和规则形式，消除了寄生SAW反射，这有望显著提高器件的Q因子。为了优化器件的性能，进行了有限元仿真。采用微纳加工技术成功制备了高性能LN SAW谐振器。该器件的谐振频率为22.22 MHz， Q因子为12245，是传统数字间电极SAW谐振器的2-3倍，而其表面积仅为传统SAW谐振器的三分之一。这些结果对环形数字间电极结构声表面波谐振器的开发和应用具有重要的参考价值。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Ultrahigh Q Lithium Niobate Resonator With Annular Interdigital Electrode Structure

This article focuses on a lithium niobate (LN) surface acoustic wave (SAW) resonator with an annular interdigital transducer (AIDT) structure. The fundamental working principles and structural characteristics of this resonator are analyzed. Due to the closed and regular form of the electrode configuration, parasitic SAW reflections are eliminated, which is expected to significantly enhance the device’s Q factor. Finite element method (FEM) simulations were conducted to optimize the device’s performance. A high-performance LN SAW resonator was successfully microfabricated using micro-nano processing technology. The fabricated device demonstrated a resonant frequency of 22.22 MHz and an impressive Q factor of 12245, which is 2–3 times higher than that of conventional SAW resonators with interdigital electrodes, while its surface area is only one-third of their size. These results offer significant insights and a valuable reference for the development and application of SAW resonators with annular interdigital electrode structures in future research.

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来源期刊

IEEE Sensors Journal 工程技术-工程：电子与电气

CiteScore

7.70

自引率

14.00%

发文量

2058

审稿时长

5.2 months

期刊介绍： The fields of interest of the IEEE Sensors Journal are the theory, design , fabrication, manufacturing and applications of devices for sensing and transducing physical, chemical and biological phenomena, with emphasis on the electronics and physics aspect of sensors and integrated sensors-actuators. IEEE Sensors Journal deals with the following: -Sensor Phenomenology, Modelling, and Evaluation -Sensor Materials, Processing, and Fabrication -Chemical and Gas Sensors -Microfluidics and Biosensors -Optical Sensors -Physical Sensors: Temperature, Mechanical, Magnetic, and others -Acoustic and Ultrasonic Sensors -Sensor Packaging -Sensor Networks -Sensor Applications -Sensor Systems: Signals, Processing, and Interfaces -Actuators and Sensor Power Systems -Sensor Signal Processing for high precision and stability (amplification, filtering, linearization, modulation/demodulation) and under harsh conditions (EMC, radiation, humidity, temperature); energy consumption/harvesting -Sensor Data Processing (soft computing with sensor data, e.g., pattern recognition, machine learning, evolutionary computation; sensor data fusion, processing of wave e.g., electromagnetic and acoustic; and non-wave, e.g., chemical, gravity, particle, thermal, radiative and non-radiative sensor data, detection, estimation and classification based on sensor data) -Sensors in Industrial Practice