1 μm nd: YAG激光产生锡等离子体光深的表征与控制

IF 2.2 3区物理与天体物理 Q2 OPTICS

Optics Communications Pub Date : 2025-04-09 DOI:10.1016/j.optcom.2025.131861

Tianze Wang , Zhenlin Hu , Liang He , Nan Lin , Yuxin Leng

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引用次数: 0

摘要

我们展示了一种表征和控制锡等离子体光学深度的方法。预等离子体羽流由预脉冲激光产生，并由第二束激光（主脉冲）再加热，产生极紫外（EUV）辐射。通过调整预脉冲和主脉冲之间的延时时间来控制euv等离子体的光深度。同时，用激光干涉法对euv发射等离子体的电子密度进行了表征。发现电子密度分布与光谱纯度（SP）相关。采用较短的预脉冲波长，在相同的光深下，随着预等离子体密度的增加，EUV的发射率增加。此外，在1 μm Nd:YAG激光器的作用下，制备出了光学薄的Sn等离子体，其光谱纯度为18.8%。该方法可用于平衡固态激光驱动的极紫外光源的发射率和光谱纯度，用于进一步的定制应用。

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Characterization and control of optical depth of 1 μm nd: YAG laser produced Sn plasma

We demonstrate a method for characterizing and controlling the optical depth of Sn plasma. A pre-plasma plume is generated by the pre-pulse laser and reheated by a second laser (the main pulse), generating extreme ultraviolet (EUV) emissions. The optical depth of the EUV-emitting plasma is controlled by adjusting the delay time between the pre-pulse and the main pulse. Meanwhile, the electron density of the EUV-emitting plasma is characterized by laser interferometry. The integrated electron density profile is found to be correlated to spectral purity (SP). By using a shorter pre-pulse wavelength, the EUV emissivity is increased with the increased pre-plasma density under the same optical depth. In addition, an optically thin Sn plasma is generated by the 1 μm Nd:YAG laser and a corresponding spectral purity of 18.8 % is observed. This method can be applied to balance the emissivity and spectral purity in solid-state laser-driven EUV sources for further customized applications.

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来源期刊

Optics Communications 物理-光学

CiteScore

5.10

自引率

8.30%

发文量

681

审稿时长

38 days

期刊介绍： Optics Communications invites original and timely contributions containing new results in various fields of optics and photonics. The journal considers theoretical and experimental research in areas ranging from the fundamental properties of light to technological applications. Topics covered include classical and quantum optics, optical physics and light-matter interactions, lasers, imaging, guided-wave optics and optical information processing. Manuscripts should offer clear evidence of novelty and significance. Papers concentrating on mathematical and computational issues, with limited connection to optics, are not suitable for publication in the Journal. Similarly, small technical advances, or papers concerned only with engineering applications or issues of materials science fall outside the journal scope.