室温射频溅射 ICO 作为 TCO 层在高性能 SHJ 太阳能电池中的优化与集成

IF 6.3 2区材料科学 Q2 ENERGY & FUELS

Solar Energy Materials and Solar Cells Pub Date : 2025-04-16 DOI:10.1016/j.solmat.2025.113637

Engin Özkol , Maria M.R. Magalhães , Yifeng Zhao , Liqi Cao , Paula Perez-Rodriguez , Katarina Kovačević , Paul Procel , Manuel João Mendes , Miro Zeman , Olindo Isabella

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Optimization and integration of room temperature RF sputtered ICO as TCO layers in high-performance SHJ solar cells

In this work, we optimize cerium-doped indium oxide – ICO – thin films with respect to sputtering parameters such as oxygen flow, deposition pressure, applied RF power. Optimized 35-nm-thick ICO layer demonstrated a mobility of 44.22 cm²/Vs, a carrier concentration of 1.65 × 10²⁰/cm³, and a resistivity of 8.56 × 10⁻⁴ Ω cm. Application of such layers into front/back contact silicon heterojunction (FBC-SHJ) solar cells enhanced the short-circuit current density (J_SC) by 0.67 when compared to SHJ cell endowed with tin-doped indium oxide (ITO), respectively. This enhancement yielded an absolute power conversion efficiency (PCE) improvement of 0.55 %, reaching efficiencies of around 23.6 % for devices with ICO layers.

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来源期刊

Solar Energy Materials and Solar Cells 工程技术-材料科学：综合

CiteScore

12.60

自引率

11.60%

发文量

513

审稿时长

47 days

期刊介绍： Solar Energy Materials & Solar Cells is intended as a vehicle for the dissemination of research results on materials science and technology related to photovoltaic, photothermal and photoelectrochemical solar energy conversion. Materials science is taken in the broadest possible sense and encompasses physics, chemistry, optics, materials fabrication and analysis for all types of materials.