新型自旋镀膜技术沉积NiO薄膜的结构和气敏性能

IF 3.2 4区 材料科学 Q2 MATERIALS SCIENCE, CERAMICS
Enes Nayman, Mehmet Fatih Gozukizil, Bayram Armutci, Sinan Temel, Fatma Ozge Gokmen
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引用次数: 0

摘要

本研究介绍了一种新型溶胶-凝胶自旋镀膜技术在玻璃基板上沉积氧化镍(NiO)薄膜的发展和应用。新设计的旋转涂层设备无需真空即可运行,为传统方法提供了一种具有成本效益的替代方案。采用溶胶-凝胶法制备了NiO薄膜,并对不同厚度和转速的薄膜质量进行了测试。利用x射线衍射(XRD)和场发射扫描电镜(FESEM)对样品进行了结构和形态分析,结果表明,在3000 rpm下包覆的6层样品具有最佳的结晶性和表面均匀性。通过气体传感器测试来评价NiO薄膜对乙醇、NO2和H2气体的敏感性。结果表明,该传感器在多个气体暴露循环中响应稳定,重现性好。它还展示了可靠气体检测应用的潜力。图形抽象
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Structural and gas sensing properties of NiO thin films deposited by a novel spin coating technique

This study presents the development and application of a novel sol-gel spin coating technique for the deposition of nickel oxide (NiO) thin films on glass substrates. The newly designed spin coating device operates without the need for a vacuum, providing a cost-effective alternative to traditional methods. NiO thin films were prepared using a sol-gel process, with various thicknesses and rotation speeds tested to idealize film quality. Structural and morphological analyses were conducted using X-Ray Diffraction (XRD) and Field Emission Scanning Electron Microscopy (FESEM), revealing that the 6-layer sample coated at 3000 rpm exhibited the best crystallization and surface homogeneity. Gas sensor tests were performed to evaluate the sensitivity of the NiO thin films to ethanol, NO2, and H2 gases. The results showed that the sensor responded stably and reproducibly over multiple gas exposure cycles. It also demonstrated the potential for reliable gas detection applications.

Graphical Abstract

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来源期刊
Journal of Sol-Gel Science and Technology
Journal of Sol-Gel Science and Technology 工程技术-材料科学:硅酸盐
CiteScore
4.70
自引率
4.00%
发文量
280
审稿时长
2.1 months
期刊介绍: The primary objective of the Journal of Sol-Gel Science and Technology (JSST), the official journal of the International Sol-Gel Society, is to provide an international forum for the dissemination of scientific, technological, and general knowledge about materials processed by chemical nanotechnologies known as the "sol-gel" process. The materials of interest include gels, gel-derived glasses, ceramics in form of nano- and micro-powders, bulk, fibres, thin films and coatings as well as more recent materials such as hybrid organic-inorganic materials and composites. Such materials exhibit a wide range of optical, electronic, magnetic, chemical, environmental, and biomedical properties and functionalities. Methods for producing sol-gel-derived materials and the industrial uses of these materials are also of great interest.
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