利用 Smart Cut™ 技术转移金刚石薄膜

IF 4.3 3区材料科学 Q2 MATERIALS SCIENCE, COATINGS & FILMS

Diamond and Related Materials Pub Date : 2025-04-09 DOI:10.1016/j.diamond.2025.112295

J. Chrétien , P. Gilles , F. Milesi , F. Berger , N. Bernier , N. Gauthier , G. Lapertot , C. Lecouvey , D. Mariolle , L. Colonel , P. Acosta Alba , F. Mazen , J. Widiez , I. Huyet , L. Le Van-Jodin

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引用次数: 0

摘要

Smart Cut™工艺最初是为制造SOI晶圆而开发的，它结合了离子注入和直接键合技术来转移单晶薄膜。在本研究中，转移技术适用于金刚石，利用高温注入引起的石墨化。利用金属键成功地将金刚石薄膜转移到硅衬底上。利用透射电镜（TEM）、电子能量损失谱（EELS）、拉曼光谱（Raman）和x射线光电子能谱（XPS）分析了转移膜的结晶度和组成。这种转移方法为获得高质量的金刚石薄膜提供了一种快速、低功耗和高效的方法，可以作为金刚石基器件的生长模板。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

Transfer of diamond thin films using Smart Cut™ technology

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Transfer of diamond thin films using Smart Cut™ technology

The Smart Cut™ process, originally developed for manufacturing SOI wafers, combines ion implantation and direct bonding techniques to transfer thin monocrystalline films. In this study, the transfer technology is adapted to diamond, leveraging the graphitization induced by high-temperature implantation. A diamond film was successfully transferred onto a silicon substrate using a metallic bonding. The crystallinity and composition of the transferred film were analyzed using Transmission Electronic Microscopy (TEM), Electron Energy Loss Spectroscopy (EELS), Raman spectroscopy and X-ray Photoelectron Spectroscopy (XPS). This transfer approach might offer a fast, low-power consumption and efficient method to obtain high quality thin diamond film which can be used as growth template for diamond-based devices.

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来源期刊

Diamond and Related Materials 工程技术-材料科学：综合

CiteScore

6.00

自引率

14.60%

发文量

702

审稿时长

2.1 months

期刊介绍： DRM is a leading international journal that publishes new fundamental and applied research on all forms of diamond, the integration of diamond with other advanced materials and development of technologies exploiting diamond. The synthesis, characterization and processing of single crystal diamond, polycrystalline films, nanodiamond powders and heterostructures with other advanced materials are encouraged topics for technical and review articles. In addition to diamond, the journal publishes manuscripts on the synthesis, characterization and application of other related materials including diamond-like carbons, carbon nanotubes, graphene, and boron and carbon nitrides. Articles are sought on the chemical functionalization of diamond and related materials as well as their use in electrochemistry, energy storage and conversion, chemical and biological sensing, imaging, thermal management, photonic and quantum applications, electron emission and electronic devices. The International Conference on Diamond and Carbon Materials has evolved into the largest and most well attended forum in the field of diamond, providing a forum to showcase the latest results in the science and technology of diamond and other carbon materials such as carbon nanotubes, graphene, and diamond-like carbon. Run annually in association with Diamond and Related Materials the conference provides junior and established researchers the opportunity to exchange the latest results ranging from fundamental physical and chemical concepts to applied research focusing on the next generation carbon-based devices.