单晶硅去除过程中应变速率对表面完整性的影响及参数优化研究

IF 6.1 1区工程技术 Q1 ENGINEERING, MECHANICAL

Tribology International Pub Date : 2025-03-28 DOI:10.1016/j.triboint.2025.110672

Jingjin Li , Shijun Ji , Ji Zhao , Peixing Ning , Wen Li , Dashun Zhang , Enzhong Zhang , Handa Dai

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引用次数: 0

摘要

本研究在综合考虑表面缺陷和去除效率的基础上，提出了切削应变率优化加工参数的创新视角。分析了宏微观应变率理论模型，揭示了切削力、材料去除效率和材料去除能量与应变率之间的内在联系。通过变深度-转速超精密车削实验和蜡缺陷抑制对比实验，研究应变速率对边缘切屑损伤、表面粗糙度和蜡缺陷抑制的影响。最后进行了多目标优化研究，以获得合适的加工区域。研究结果为合理选择切削加工参数提供了理论和实验依据。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Research on effect of strain rate on surface integrity in removal of single crystal silicon and parameter optimization

In this study, an innovative perspective of cutting strain rate for optimizing processing parameters is presented, with a comprehensive consideration of surface defects and the removal efficiency. The Macro-microscopic strain rate theoretical model is analyzed, revealing the inherent connection between cutting force, material removal efficiency and material removal energy with strain rate. Furthermore, variable depth-speed ultra-precision turning experiment and wax defect suppression comparison experiment were performed to study the effect of strain rate on edge chipping damage, surface roughness and wax defect suppression. Finally, the multi-objective optimization is studied to obtain suitable processing area. The results provide a theoretical and experimental basis for the reasonable selection of cutting processing parameters.

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来源期刊

Tribology International 工程技术-工程：机械

CiteScore

10.10

自引率

16.10%

发文量

627

审稿时长

35 days

期刊介绍： Tribology is the science of rubbing surfaces and contributes to every facet of our everyday life, from live cell friction to engine lubrication and seismology. As such tribology is truly multidisciplinary and this extraordinary breadth of scientific interest is reflected in the scope of Tribology International. Tribology International seeks to publish original research papers of the highest scientific quality to provide an archival resource for scientists from all backgrounds. Written contributions are invited reporting experimental and modelling studies both in established areas of tribology and emerging fields. Scientific topics include the physics or chemistry of tribo-surfaces, bio-tribology, surface engineering and materials, contact mechanics, nano-tribology, lubricants and hydrodynamic lubrication.