通过凝胶浇注法制造熔融石英微透镜阵列，并通过控制凝胶固体含量调节焦距

IF 3.2 3区材料科学 Q1 MATERIALS SCIENCE, CERAMICS

Journal of Non-crystalline Solids Pub Date : 2025-04-10 DOI:10.1016/j.jnoncrysol.2025.123519

Haikuan Chen, Xiaoyan Sun, Zhouwei He, Dejian Kong, Qinglong Zhang, Youwang Hu, Ji'an Duan

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引用次数: 0

摘要

本文提出了一种用凝胶浇铸和模板转移制备熔融硅准周期微透镜阵列（MLA）的方法。在保持浆料粘度一致的同时，通过精确控制聚乙烯醇（PVA）含量来调节固体含量，从而改变烧结收缩率，调节微透镜焦距。本研究确定了适宜的粘度阈值为300 mPa·s。在1300℃的真空气氛中烧结30 min，可以将绿体转化为熔融二氧化硅MLA。此外，本研究建立了PVA含量与微透镜特征尺寸之间的定量关系。对制备的多焦微透镜阵列（MF-MLA）进行了测量，发现通过调整PVA的含量，焦距可以在−320.03 μm ~−37.14 μm和−110.56 μm ~−25.29 μm范围内变化。这种方法为熔融硅微光学元件的生产提供了一种高效、适应性强、环保的方法。

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Fabrication of fused silica microlens arrays by gel casting and modulation of focal length by controlling gel solid content

This article presents a method for fabricating fused silica quasi-periodic microlens array (MLA) by gel casting and template transfer. While keeping slurry viscosity consistent, by precisely controlling polyvinyl alcohol (PVA) content to adjust solid content, which can alter sintering shrinkage and regulates microlens focal length. This study determined an appropriate viscosity threshold of 300 mPa·s. The green body can be transformed into a fused silica MLA by sintering in a vacuum atmosphere at 1300 °C for 30 min. Additionally, this study established a quantitative relationship between the PVA content and the characteristic dimensions of the microlens. After measuring the prepared multifocal microlens array (MF-MLA), it was found that by adjusting the PVA content, the focal length can vary in the range of −320.03 μm to −37.14 μm and −110.56 μm to −25.29 μm. This approach provides an efficient, adaptable, and environmentally friendly way for the production of fused silica micro-optical components.

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来源期刊

Journal of Non-crystalline Solids 工程技术-材料科学：硅酸盐

CiteScore

6.50

自引率

11.40%

发文量

576

审稿时长

35 days

期刊介绍： The Journal of Non-Crystalline Solids publishes review articles, research papers, and Letters to the Editor on amorphous and glassy materials, including inorganic, organic, polymeric, hybrid and metallic systems. Papers on partially glassy materials, such as glass-ceramics and glass-matrix composites, and papers involving the liquid state are also included in so far as the properties of the liquid are relevant for the formation of the solid. In all cases the papers must demonstrate both novelty and importance to the field, by way of significant advances in understanding or application of non-crystalline solids; in the case of Letters, a compelling case must also be made for expedited handling.