用于电致变色器件的具有Zn-Al-O界面的原子层沉积柔性ZnO透明电极

IF 5.1 2区材料科学 Q1 MATERIALS SCIENCE, CERAMICS

Ceramics International Pub Date : 2025-04-01 DOI:10.1016/j.ceramint.2025.01.148

Xi Chen , Nan Zhang , Lu Wang , Yuechan Li , Yujie Yan , Xiuxiu Li , An Xie , Dongya Sun , Jiajia Han

{"title":"用于电致变色器件的具有Zn-Al-O界面的原子层沉积柔性ZnO透明电极","authors":"Xi Chen , Nan Zhang , Lu Wang , Yuechan Li , Yujie Yan , Xiuxiu Li , An Xie , Dongya Sun , Jiajia Han","doi":"10.1016/j.ceramint.2025.01.148","DOIUrl":null,"url":null,"abstract":"<div><div>Flexible electrochromic devices (ECDs) have received much attention in application of the next-generation wearable smart window, display and energy storage system. Apart from electrochromic layer, the transparent conductive electrode as one of the important components is required to have the flexible ability as well. In this study, a flexible Al-doped ZnO (AZO) transparent electrode with Zn-Al-O interfaces on polyethylene terephthalate (PET) is prepared by the plasma assisted atomic layer deposition (PEALD) technology. The influence of doping ratio, temperature and other factors on the structure and optoelectronic properties in the doped ZnO film was investigated. The resulted Al-doped ZnO electrode achieved high transmittance of 91 % and low resistivity of 6.6 × 10<sup>−3</sup> Ω cm under the 200 °C and a doping ratio R<sub>ZnO:Zn-Al-O</sub> with 14:1 due to increased electrons concentration supported by the partial states density states (PDOS). In addition, a tungsten oxide (WO<sub>3</sub>) layer was successfully deposited on a pre prepared AZO transparent electrode, forming a PET/AZO/WO<sub>3</sub> composite material to fabricate an electrochromic device. A distinct change in color from transparent to a deep blue hue was observed with a high modulation range of 53 % and a coloring efficiency of 46.7 cm<sup>2</sup> C<sup>−1</sup> under the 550 nm. Finally, the flexible AZO transparent electrode obtained about 95 % of initial value after 100 bending cycles and showed high mechanical robustness. All results demonstrate the PEALD-deposited Al-doped ZnO films have great potential for high-performance and flexible transparent electrode.</div></div>","PeriodicalId":267,"journal":{"name":"Ceramics International","volume":"51 10","pages":"Pages 13018-13027"},"PeriodicalIF":5.1000,"publicationDate":"2025-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Atomic Layer-deposited flexible ZnO transparent electrodes with Zn-Al-O interface for electrochromic devices\",\"authors\":\"Xi Chen , Nan Zhang , Lu Wang , Yuechan Li , Yujie Yan , Xiuxiu Li , An Xie , Dongya Sun , Jiajia Han\",\"doi\":\"10.1016/j.ceramint.2025.01.148\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>Flexible electrochromic devices (ECDs) have received much attention in application of the next-generation wearable smart window, display and energy storage system. Apart from electrochromic layer, the transparent conductive electrode as one of the important components is required to have the flexible ability as well. In this study, a flexible Al-doped ZnO (AZO) transparent electrode with Zn-Al-O interfaces on polyethylene terephthalate (PET) is prepared by the plasma assisted atomic layer deposition (PEALD) technology. The influence of doping ratio, temperature and other factors on the structure and optoelectronic properties in the doped ZnO film was investigated. The resulted Al-doped ZnO electrode achieved high transmittance of 91 % and low resistivity of 6.6 × 10<sup>−3</sup> Ω cm under the 200 °C and a doping ratio R<sub>ZnO:Zn-Al-O</sub> with 14:1 due to increased electrons concentration supported by the partial states density states (PDOS). In addition, a tungsten oxide (WO<sub>3</sub>) layer was successfully deposited on a pre prepared AZO transparent electrode, forming a PET/AZO/WO<sub>3</sub> composite material to fabricate an electrochromic device. A distinct change in color from transparent to a deep blue hue was observed with a high modulation range of 53 % and a coloring efficiency of 46.7 cm<sup>2</sup> C<sup>−1</sup> under the 550 nm. Finally, the flexible AZO transparent electrode obtained about 95 % of initial value after 100 bending cycles and showed high mechanical robustness. All results demonstrate the PEALD-deposited Al-doped ZnO films have great potential for high-performance and flexible transparent electrode.</div></div>\",\"PeriodicalId\":267,\"journal\":{\"name\":\"Ceramics International\",\"volume\":\"51 10\",\"pages\":\"Pages 13018-13027\"},\"PeriodicalIF\":5.1000,\"publicationDate\":\"2025-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Ceramics International\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0272884225001592\",\"RegionNum\":2,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"MATERIALS SCIENCE, CERAMICS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Ceramics International","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0272884225001592","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"MATERIALS SCIENCE, CERAMICS","Score":null,"Total":0}

引用次数: 0

摘要

柔性电致变色器件（ECDs）在下一代可穿戴智能窗口、显示和储能系统中的应用备受关注。除电致变色层外，作为重要组成部分之一的透明导电电极也要求具有柔性。本研究采用等离子体辅助原子层沉积（PEALD）技术，在聚对苯二甲酸乙二醇酯（PET）上制备了具有Zn-Al-O界面的柔性掺铝ZnO （AZO）透明电极。研究了掺杂比、温度等因素对ZnO薄膜结构和光电性能的影响。在200°C下，al掺杂ZnO电极的透射率高达91%，电阻率为6.6 × 10−3 Ω cm，掺杂比为14:1，这是由于部分态密度态（PDOS）支持的电子浓度增加。此外，将氧化钨（WO3）层成功沉积在预先制备的AZO透明电极上，形成PET/AZO/WO3复合材料，制备电致变色器件。在550 nm下，观察到从透明到深蓝色调的明显变化，具有53%的高调制范围和46.7 cm2 C−1的着色效率。最后，经100次弯曲后，柔性AZO透明电极获得了初始值的95%左右，并表现出较高的机械稳健性。实验结果表明，制备的al掺杂ZnO薄膜具有高性能、柔性透明电极的潜力。

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Atomic Layer-deposited flexible ZnO transparent electrodes with Zn-Al-O interface for electrochromic devices

Flexible electrochromic devices (ECDs) have received much attention in application of the next-generation wearable smart window, display and energy storage system. Apart from electrochromic layer, the transparent conductive electrode as one of the important components is required to have the flexible ability as well. In this study, a flexible Al-doped ZnO (AZO) transparent electrode with Zn-Al-O interfaces on polyethylene terephthalate (PET) is prepared by the plasma assisted atomic layer deposition (PEALD) technology. The influence of doping ratio, temperature and other factors on the structure and optoelectronic properties in the doped ZnO film was investigated. The resulted Al-doped ZnO electrode achieved high transmittance of 91 % and low resistivity of 6.6 × 10⁻³ Ω cm under the 200 °C and a doping ratio R_ZnO:Zn-Al-O with 14:1 due to increased electrons concentration supported by the partial states density states (PDOS). In addition, a tungsten oxide (WO₃) layer was successfully deposited on a pre prepared AZO transparent electrode, forming a PET/AZO/WO₃ composite material to fabricate an electrochromic device. A distinct change in color from transparent to a deep blue hue was observed with a high modulation range of 53 % and a coloring efficiency of 46.7 cm² C⁻¹ under the 550 nm. Finally, the flexible AZO transparent electrode obtained about 95 % of initial value after 100 bending cycles and showed high mechanical robustness. All results demonstrate the PEALD-deposited Al-doped ZnO films have great potential for high-performance and flexible transparent electrode.

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来源期刊

Ceramics International 工程技术-材料科学：硅酸盐

CiteScore

9.40

自引率

15.40%

发文量

4558

审稿时长

25 days

期刊介绍： Ceramics International covers the science of advanced ceramic materials. The journal encourages contributions that demonstrate how an understanding of the basic chemical and physical phenomena may direct materials design and stimulate ideas for new or improved processing techniques, in order to obtain materials with desired structural features and properties. Ceramics International covers oxide and non-oxide ceramics, functional glasses, glass ceramics, amorphous inorganic non-metallic materials (and their combinations with metal and organic materials), in the form of particulates, dense or porous bodies, thin/thick films and laminated, graded and composite structures. Process related topics such as ceramic-ceramic joints or joining ceramics with dissimilar materials, as well as surface finishing and conditioning are also covered. Besides traditional processing techniques, manufacturing routes of interest include innovative procedures benefiting from externally applied stresses, electromagnetic fields and energetic beams, as well as top-down and self-assembly nanotechnology approaches. In addition, the journal welcomes submissions on bio-inspired and bio-enabled materials designs, experimentally validated multi scale modelling and simulation for materials design, and the use of the most advanced chemical and physical characterization techniques of structure, properties and behaviour. Technologically relevant low-dimensional systems are a particular focus of Ceramics International. These include 0, 1 and 2-D nanomaterials (also covering CNTs, graphene and related materials, and diamond-like carbons), their nanocomposites, as well as nano-hybrids and hierarchical multifunctional nanostructures that might integrate molecular, biological and electronic components.