具有高 Q 值单微孔的单片集成硅光子光谱仪

IF 9.8 1区 物理与天体物理 Q1 OPTICS
Long Zhang, Shihan Hong, Xiaolin Yi, Tangnan Chen, Hengzhen Cao, Dajian Liu, Pan Wang, Yaocheng Shi, Jianjun He, Daoxin Dai
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引用次数: 0

摘要

具有卓越性能的高度集成光谱仪非常适合各种应用,如消费电子和人体健康。本文提出并实现了一种单片集成微环光谱仪。提出了一种利用单微环的自由频谱范围色散,诱导共振峰红移两倍以上的创新方案。这样,在重建算法的帮助下,单微环的工作窗口被大大扩展,远远超出了FSR的限制。此外,通过引入采用修正欧拉曲线设计的低损耗加宽光波导,实现了高q因子的单微环,从而实现了高分辨率的光谱测量。采用Ge/Si光电探测器的单片集成硅单微环光谱仪,在66 nm的宽工作窗口(比微环的FSR大15倍)下,实验证明其分辨率高达0.02 nm。此外,目前的片上光谱仪采用硅光子学的标准工艺制造,具有370 × 110µm2的超紧凑尺寸,是迄今为止最小的单片集成光谱仪之一。该光谱仪具有优异的性能、紧凑的体积和集成密度,有望实现低成本的便携式传感模块和芯片实验室系统。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Monolithically-Integrated Silicon Photonic Spectrometer with a High-Q Single-Microring

Monolithically-Integrated Silicon Photonic Spectrometer with a High-Q Single-Microring
Highly-integrated spectrometers with performance excellence are extremely desired for various applications, such as consumer electronics and human health wellness. Here, a monolithically-integrated single-microring spectrometer is proposed and realized. An innovative scheme of utilizing the free spectral range (FSR) dispersion for a single-microring and strategically inducing resonant peaks red-shift more than twice of the FSR is proposed. In this way, the working window of the single-microring is significantly extended far beyond the FSR limitation with the assistance of reconstruction algorithm. Moreover, the single-microring is realized with a high-Q factor by introducing low-loss broadened optical waveguides designed with modified-Euler curves, resulting in high-resolution spectrum measurement. The monolithically-integrated silicon single-microring spectrometer with a Ge/Si photodetector, is experimentally demonstrated with a resolution as high as 0.02 nm in a broad working window of 66 nm (which is >15 times larger than the microring's FSR). Besides, the present on-chip spectrometer is fabricated with standard processes for silicon photonics, showing an ultra-compact footprint of 370 × 110 µm2, which is one of the smallest monolithically-integrated spectrometer to date. The present spectrometer is expected to be very attractive for realizing low-cost portable sensing modules and lab-on-a-chip systems because of the performance excellence, the footprint compactness and the integration density.
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来源期刊
CiteScore
14.20
自引率
5.50%
发文量
314
审稿时长
2 months
期刊介绍: Laser & Photonics Reviews is a reputable journal that publishes high-quality Reviews, original Research Articles, and Perspectives in the field of photonics and optics. It covers both theoretical and experimental aspects, including recent groundbreaking research, specific advancements, and innovative applications. As evidence of its impact and recognition, Laser & Photonics Reviews boasts a remarkable 2022 Impact Factor of 11.0, according to the Journal Citation Reports from Clarivate Analytics (2023). Moreover, it holds impressive rankings in the InCites Journal Citation Reports: in 2021, it was ranked 6th out of 101 in the field of Optics, 15th out of 161 in Applied Physics, and 12th out of 69 in Condensed Matter Physics. The journal uses the ISSN numbers 1863-8880 for print and 1863-8899 for online publications.
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