修正：低温探测器用SOI衬底上硼注入硅超导薄膜的制备与表征

{"title":"修正：低温探测器用SOI衬底上硼注入硅超导薄膜的制备与表征","authors":"A. Aliane, L. Dussopt, S. Kerdilès, H. Kaya, P. Acosta-Alba, N. Bernier, A.-M. Papon, E. Martinez, M. Veillerot, F. Lefoch","doi":"10.1007/s10909-024-03226-7","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":641,"journal":{"name":"Journal of Low Temperature Physics","volume":"219 1-2","pages":"77 - 77"},"PeriodicalIF":1.1000,"publicationDate":"2024-11-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Correction: Fabrication and Characterization of Boron-Implanted Silicon Superconducting Thin Films on SOI Substrates for Low-Temperature Detectors\",\"authors\":\"A. Aliane, L. Dussopt, S. Kerdilès, H. Kaya, P. Acosta-Alba, N. Bernier, A.-M. Papon, E. Martinez, M. Veillerot, F. Lefoch\",\"doi\":\"10.1007/s10909-024-03226-7\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":641,\"journal\":{\"name\":\"Journal of Low Temperature Physics\",\"volume\":\"219 1-2\",\"pages\":\"77 - 77\"},\"PeriodicalIF\":1.1000,\"publicationDate\":\"2024-11-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Low Temperature Physics\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://link.springer.com/article/10.1007/s10909-024-03226-7\",\"RegionNum\":3,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"PHYSICS, APPLIED\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Low Temperature Physics","FirstCategoryId":"101","ListUrlMain":"https://link.springer.com/article/10.1007/s10909-024-03226-7","RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, APPLIED","Score":null,"Total":0}