通过电极工程实现高耐久性和低矫顽压铁电隧道结

IF 3.5 2区物理与天体物理 Q2 PHYSICS, APPLIED

Applied Physics Letters Pub Date : 2025-04-04 DOI:10.1063/5.0256127

Yefan Zhang, Xiaopeng Luo, Xiao Long, Peng Yang, Shihao Yu, Yang Liu, Zihao Hou, Wei Wu, Sen Liu, Zhiwei Li, Yi Sun, Qingjiang Li

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High endurance and low coercive voltage ferroelectric tunnel junction by electrode engineering

In this paper, we report a high endurance and low coercive voltage (Vc) ferroelectric tunnel junction (FTJ) device by replacing the TiN top electrode with W electrode after annealing. This method implants a TiNOx thin layer, which reduces leakage current and increases breakdown voltage (Vbd), leading to better device endurance. It can also effectively promote the formation of orthogonal phase and inhibit tetragonal phase during the wake-up process, which contributes to reducing Vc. Therefore, the proposed 5 nm H0.5Z0.5O2 (HZO) FTJ exhibits excellent performances, such as low Vc (0.49 V), small Vc/Vbd ratio (19.1%), high endurance (>1011), and high double remanent polarization (2Pr = 41 μC/cm2), which are the frontier of the reported HfO2-based FTJ. The results strongly indicate that the FTJ has high potential in addressing the frequent weight changes generated by brain-like computational training and learning.

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来源期刊

Applied Physics Letters 物理-物理：应用

CiteScore

6.40

自引率

10.00%

发文量

1821

审稿时长

1.6 months

期刊介绍： Applied Physics Letters (APL) features concise, up-to-date reports on significant new findings in applied physics. Emphasizing rapid dissemination of key data and new physical insights, APL offers prompt publication of new experimental and theoretical papers reporting applications of physics phenomena to all branches of science, engineering, and modern technology. In addition to regular articles, the journal also publishes invited Fast Track, Perspectives, and in-depth Editorials which report on cutting-edge areas in applied physics. APL Perspectives are forward-looking invited letters which highlight recent developments or discoveries. Emphasis is placed on very recent developments, potentially disruptive technologies, open questions and possible solutions. They also include a mini-roadmap detailing where the community should direct efforts in order for the phenomena to be viable for application and the challenges associated with meeting that performance threshold. Perspectives are characterized by personal viewpoints and opinions of recognized experts in the field. Fast Track articles are invited original research articles that report results that are particularly novel and important or provide a significant advancement in an emerging field. Because of the urgency and scientific importance of the work, the peer review process is accelerated. If, during the review process, it becomes apparent that the paper does not meet the Fast Track criterion, it is returned to a normal track.