Pioneering work for the implementation of the inverted fireball technology for more effective PVD magnetron sputtering

Inverted fireballs (IFBs) represent a groundbreaking advance in plasma physics, offering a new level of control over plasma density and surface modification capabilities. Despite their remarkable potential, the integration of IFBs with established industrial processes remains a significant challenge. Here, we demonstrate the first successful incorporation of an IFB configuration into a magnetron sputtering system, marking a crucial breakthrough in plasma-assisted coating technology.

Using titanium deposition onto high-speed steel as a model system, we investigated plasma parameters and resulting film properties. Multipole resonance probe measurements revealed plasma densities reaching 1 × 10¹⁶ m⁻³, while optical emission spectroscopy provided insights into the plasma composition. The IFB-assisted magnetron sputtering process yielded films with significantly enhanced mechanical properties, particularly increased hardness, compared to conventional magnetron sputtering.

This advance overcomes the previous limitations of IFB technology, which was restricted to DC or AC discharges and gaseous precursors. This new approach, using a magnetron sputtering source and an IFB, enables its application with solid precursors and metal-based plasmas. Our results establish a new paradigm for plasma-assisted coating processes, offering improved efficiency and enhanced technological possibilities for industrial applications. This innovative combination of IFB and magnetron sputtering technologies opens new avenues for advanced materials processing and surface engineering.