基于锥体信号的光学多孔径系统相位检测方法

IF 3.5 2区 工程技术 Q2 OPTICS
Shengqian Wang , Kunkun Cheng , Xuesheng Liu , Yuandong Cheng
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引用次数: 0

摘要

在光学多孔径系统中,利用光束聚焦在金字塔上的重叠瞳孔,实现了一种像金字塔波前传感器一样的相位法。该方法的物理思想是基于金字塔的焦平面滤波器,将多孔径系统中不同子孔径的光束组合在一起形成干涉。当子孔径之间存在共相活塞误差时,干涉图样的形状会发生明显变化,从而可以通过这种变化获得活塞误差信息。理论分析和仿真结果表明,该检测方法具有良好的精度和线性度。基于该方法进行了室内实验,结果表明,该方法的测量精度在10nm以内。采用双波长技术解决相位模糊,实现了大活塞误差的闭环校正,动态范围可达几微米。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Phasing detection method for the optical multiple-aperture system based on the pyramidal signal
A phasing method for the optical multiple-aperture system can be realized using the overlapping pupils when the light beam is focused onto a pyramid, like a pyramid wavefront sensor. The physical idea of this method is to combine beams from different sub-apertures of the multiple-aperture system to form interference based on focal plane filter of the pyramid. When there is a co-phasing piston error between the sub-apertures, the shape of the interference pattern will change significantly, so that the piston error information can be obtained through this change. Theory analysis and simulation results show that this detection method has good accuracy and linearity. The laboratory experiment based on this method was carried out and the results show that the measurement accuracy of the method is within 10nm. Closed-loop correction of large piston error is also realized by using dual-wavelength technique to resolve the phase ambiguity and the dynamic range can reach several micrometers.
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来源期刊
Optics and Lasers in Engineering
Optics and Lasers in Engineering 工程技术-光学
CiteScore
8.90
自引率
8.70%
发文量
384
审稿时长
42 days
期刊介绍: Optics and Lasers in Engineering aims at providing an international forum for the interchange of information on the development of optical techniques and laser technology in engineering. Emphasis is placed on contributions targeted at the practical use of methods and devices, the development and enhancement of solutions and new theoretical concepts for experimental methods. Optics and Lasers in Engineering reflects the main areas in which optical methods are being used and developed for an engineering environment. Manuscripts should offer clear evidence of novelty and significance. Papers focusing on parameter optimization or computational issues are not suitable. Similarly, papers focussed on an application rather than the optical method fall outside the journal''s scope. The scope of the journal is defined to include the following: -Optical Metrology- Optical Methods for 3D visualization and virtual engineering- Optical Techniques for Microsystems- Imaging, Microscopy and Adaptive Optics- Computational Imaging- Laser methods in manufacturing- Integrated optical and photonic sensors- Optics and Photonics in Life Science- Hyperspectral and spectroscopic methods- Infrared and Terahertz techniques
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