{"title":"基于AlN/Al0.7Sc0.3N薄膜的可开关体声谐振器","authors":"Jinghong Lu, Chongyang Huo, Xuanqi Huang, Weimin Li, Zhiqiang Mu, Wenjie Yu","doi":"10.1049/ell2.70241","DOIUrl":null,"url":null,"abstract":"<p>Tuneable filters are essential for the development of the reconfigurable RF modules. This work demonstrates a switchable bulk acoustic wave resonator utilizing a double-layer structure of piezoelectric AlN and ferroelectric Al<sub>0.7</sub>Sc<sub>0.3</sub>N films. By applying a DC bias, the resonator achieves frequency switching through the control of the polarization in the Al<sub>0.7</sub>Sc<sub>0.3</sub>N layer. The resonator exhibits dual-mode operation, with tuneable resonant frequencies between 6.80 and 16.73 GHz, while maintaining considerable electromechanical coupling efficiency at high frequencies. These characteristics reveal great potential of this device for the development of reconfigurable acoustic filters and RF modules in advanced wireless communication systems.</p>","PeriodicalId":11556,"journal":{"name":"Electronics Letters","volume":"61 1","pages":""},"PeriodicalIF":0.7000,"publicationDate":"2025-03-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1049/ell2.70241","citationCount":"0","resultStr":"{\"title\":\"Switchable Bulk Acoustic Resonator Based on AlN/Al0.7Sc0.3N Films\",\"authors\":\"Jinghong Lu, Chongyang Huo, Xuanqi Huang, Weimin Li, Zhiqiang Mu, Wenjie Yu\",\"doi\":\"10.1049/ell2.70241\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>Tuneable filters are essential for the development of the reconfigurable RF modules. This work demonstrates a switchable bulk acoustic wave resonator utilizing a double-layer structure of piezoelectric AlN and ferroelectric Al<sub>0.7</sub>Sc<sub>0.3</sub>N films. By applying a DC bias, the resonator achieves frequency switching through the control of the polarization in the Al<sub>0.7</sub>Sc<sub>0.3</sub>N layer. The resonator exhibits dual-mode operation, with tuneable resonant frequencies between 6.80 and 16.73 GHz, while maintaining considerable electromechanical coupling efficiency at high frequencies. These characteristics reveal great potential of this device for the development of reconfigurable acoustic filters and RF modules in advanced wireless communication systems.</p>\",\"PeriodicalId\":11556,\"journal\":{\"name\":\"Electronics Letters\",\"volume\":\"61 1\",\"pages\":\"\"},\"PeriodicalIF\":0.7000,\"publicationDate\":\"2025-03-29\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://onlinelibrary.wiley.com/doi/epdf/10.1049/ell2.70241\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Electronics Letters\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://onlinelibrary.wiley.com/doi/10.1049/ell2.70241\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Electronics Letters","FirstCategoryId":"5","ListUrlMain":"https://onlinelibrary.wiley.com/doi/10.1049/ell2.70241","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Switchable Bulk Acoustic Resonator Based on AlN/Al0.7Sc0.3N Films
Tuneable filters are essential for the development of the reconfigurable RF modules. This work demonstrates a switchable bulk acoustic wave resonator utilizing a double-layer structure of piezoelectric AlN and ferroelectric Al0.7Sc0.3N films. By applying a DC bias, the resonator achieves frequency switching through the control of the polarization in the Al0.7Sc0.3N layer. The resonator exhibits dual-mode operation, with tuneable resonant frequencies between 6.80 and 16.73 GHz, while maintaining considerable electromechanical coupling efficiency at high frequencies. These characteristics reveal great potential of this device for the development of reconfigurable acoustic filters and RF modules in advanced wireless communication systems.
期刊介绍：
Electronics Letters is an internationally renowned peer-reviewed rapid-communication journal that publishes short original research papers every two weeks. Its broad and interdisciplinary scope covers the latest developments in all electronic engineering related fields including communication, biomedical, optical and device technologies. Electronics Letters also provides further insight into some of the latest developments through special features and interviews.
Scope
As a journal at the forefront of its field, Electronics Letters publishes papers covering all themes of electronic and electrical engineering. The major themes of the journal are listed below.
Antennas and Propagation
Biomedical and Bioinspired Technologies, Signal Processing and Applications
Control Engineering
Electromagnetism: Theory, Materials and Devices
Electronic Circuits and Systems
Image, Video and Vision Processing and Applications
Information, Computing and Communications
Instrumentation and Measurement
Microwave Technology
Optical Communications
Photonics and Opto-Electronics
Power Electronics, Energy and Sustainability
Radar, Sonar and Navigation
Semiconductor Technology
Signal Processing
MIMO
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