Seungwan Woo , Eungbeom Yeon , Jeongeun Mo , Sukkyu Hong , Ho Won Jang , Daehwan Jung , Won Jun Choi
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引用次数: 0
摘要
在GaSb衬底上的0.1 eV InAs1-xSbx层的变质生长为开发具有成本效益和可扩展的长波红外(LWIR)光电探测器提供了一条有前途的途径。为了解决InAsSb和GaSb之间晶格失配的挑战,一个复杂的变质缓冲设计是必不可少的。在这项研究中,我们报告了一个优化的InGaSb线性渐变缓冲层,以在GaSb衬底上生长高质量的InAsSb层。我们专注于优化生长温度,以放松残余应变,并实现光滑的表面形貌,为潜在的LWIR探测器应用。将生长温度从400 °C提高到450 °C,可以有效地减少微柱的形成,促进高度的应变松弛(>;90 %)。此外,我们还研究了InGaSb级配缓冲剂的级配速率对表面形貌和位错扩展的影响。通过将缓冲层厚度从100 nm改变到1000 nm,我们还发现晶体缺陷如层错、螺纹位错和相分离可以最小化。这种系统的方法为在低红外应用的GaSb衬底上生长高质量的0.1 eV InAsSb层提供了有价值的见解。
Growth of InxGa1-xSb linearly graded buffers on GaSb substrate for ultra-low bandgap 0.1 eV InAsSb layer
Metamorphic growth of 0.1 eV InAs1-xSbx layers on GaSb substrates presents a promising pathway for the development of cost-effective and scalable long-wavelength infrared (LWIR) photodetectors. To address the lattice mismatch challenge between InAsSb and GaSb, a sophisticated metamorphic buffer design is essential. In this study, we report an optimized InGaSb linearly graded buffer layer to grow a high-quality InAsSb layer on a GaSb substrate. We focus on optimizing the growth temperature to relax residual strain and achieve a smooth surface morphology for potential LWIR detector applications. Raising the growth temperature from 400 °C to 450 °C effectively reduces micro-pillar formations and promotes a high degree of strain relaxation (> 90 %). In addition, we study effects of grading rates of InGaSb graded buffers on surface morphology and dislocation propagation. By varying the buffer thickness from 100 nm to 1000 nm, we also find that crystal defects such as stacking faults, threading dislocations, and phase separation can be minimized. This systematic approach provides valuable insights for the growth of high-quality 0.1 eV InAsSb layers on GaSb substrate for LWIR applications.
期刊介绍:
Applied Surface Science covers topics contributing to a better understanding of surfaces, interfaces, nanostructures and their applications. The journal is concerned with scientific research on the atomic and molecular level of material properties determined with specific surface analytical techniques and/or computational methods, as well as the processing of such structures.