Research progress on hazardous fluorine-containing wastewater treatment in the integrated circuit industry: A resource recovery perspective

The integrated circuit (IC) industry is a key driver of technological progress, and during the wafer manufacturing process, a large amount of fluorine-containing wastewater is generated. These wastewaters not only pose environmental risks but also contain significant resource potential. Fluorspar (CaF₂), the primary raw material for producing fluorinated chemicals, is considered an important and scarce resource and has been designated as a strategic mineral in many countries and regions. If fluorine-containing wastewater can be treated and recycled as a secondary resource, it would help alleviate the pressure on CaF₂ supply while generating multiple benefits in terms of environmental protection, resource security, and economic value. However, the current strategy in the IC industry for handling fluorine-containing wastewater primarily focuses on meeting discharge standards rather than resource recovery. This approach not only exacerbates environmental pollution but also leads to resource wastage. In response, this paper analyzes the latest advancements in fluorine-containing wastewater treatment technologies from the perspective of resource recovery, discussing their principles, advantages, and challenges. It also presents several practical cases of fluorine-containing wastewater resource recovery that can be directly replicated for reference. Finally, the paper explores the future prospects of resource recovery strategies in wastewater management within the IC industry, aiming to provide valuable insights into the resource recovery of wastewater in this field.