{"title":"液滴表面局部能量沉积诱导的流动模式和波传播","authors":"Zhu-Jun Li, Yi Shen, Hang Ding","doi":"10.1007/s11433-024-2604-6","DOIUrl":null,"url":null,"abstract":"<div><p>Interaction between metallic droplets and picosecond laser pre-pulse can shape the droplet into a target more favorable for the main pulse to efficiently generate extreme ultraviolet (EUV) light for nanolithography. After the radiation of the pre-pulse, flow pattern and wave propagation in the droplet are responsible for the deformation and fragmentation of the droplet at a late time. In this study, we numerically investigate the acoustic response and dynamic behaviors of a droplet subjected to a localized heat pulse in the vicinity of the droplet surface, which models the energy deposition of a picosecond (ps) laser pre-pulse. A second-order conservative sharp interface method is adopted to simulate corresponding compressible inviscid two-phase flows. Based on the numerical results, we find that a wave structure of compression-expansion-compression waves propagates in the spherical droplet, and that the asymmetry of the heat source around the droplet surface accounts for the occurrence of the secondary compression wave. Then, we assess the occurrence and propagation of the wave structures, and correlate the wave amplitude with the intensity of the deposited energy. In particular, a theoretical model for the wave propagation is established under the small perturbation assumption, and indicates that the minimum pressure should be inversely proportional to its distance to the droplet center. This theoretical prediction is in good agreement with the numerical results with low intensity of heat source. With the increase of intensity of heat source, the numerical results gradually deviate from the theoretical prediction, because of the failure of the small perturbation assumption at high deposition energy and the effect of asymmetry in geometry on the wave propagation. This study provides an insight into the physical mechanisms of a droplet radiated by a ps laser pulse, which may be helpful in designing the desirable target for efficient laser-induced EUV light generation.</p></div>","PeriodicalId":774,"journal":{"name":"Science China Physics, Mechanics & Astronomy","volume":"68 9","pages":""},"PeriodicalIF":6.4000,"publicationDate":"2025-03-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Flow pattern and wave propagation induced by local energy deposition at droplet surface\",\"authors\":\"Zhu-Jun Li, Yi Shen, Hang Ding\",\"doi\":\"10.1007/s11433-024-2604-6\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>Interaction between metallic droplets and picosecond laser pre-pulse can shape the droplet into a target more favorable for the main pulse to efficiently generate extreme ultraviolet (EUV) light for nanolithography. After the radiation of the pre-pulse, flow pattern and wave propagation in the droplet are responsible for the deformation and fragmentation of the droplet at a late time. In this study, we numerically investigate the acoustic response and dynamic behaviors of a droplet subjected to a localized heat pulse in the vicinity of the droplet surface, which models the energy deposition of a picosecond (ps) laser pre-pulse. A second-order conservative sharp interface method is adopted to simulate corresponding compressible inviscid two-phase flows. Based on the numerical results, we find that a wave structure of compression-expansion-compression waves propagates in the spherical droplet, and that the asymmetry of the heat source around the droplet surface accounts for the occurrence of the secondary compression wave. Then, we assess the occurrence and propagation of the wave structures, and correlate the wave amplitude with the intensity of the deposited energy. In particular, a theoretical model for the wave propagation is established under the small perturbation assumption, and indicates that the minimum pressure should be inversely proportional to its distance to the droplet center. This theoretical prediction is in good agreement with the numerical results with low intensity of heat source. With the increase of intensity of heat source, the numerical results gradually deviate from the theoretical prediction, because of the failure of the small perturbation assumption at high deposition energy and the effect of asymmetry in geometry on the wave propagation. This study provides an insight into the physical mechanisms of a droplet radiated by a ps laser pulse, which may be helpful in designing the desirable target for efficient laser-induced EUV light generation.</p></div>\",\"PeriodicalId\":774,\"journal\":{\"name\":\"Science China Physics, Mechanics & Astronomy\",\"volume\":\"68 9\",\"pages\":\"\"},\"PeriodicalIF\":6.4000,\"publicationDate\":\"2025-03-19\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Science China Physics, Mechanics & Astronomy\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://link.springer.com/article/10.1007/s11433-024-2604-6\",\"RegionNum\":1,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"PHYSICS, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Science China Physics, Mechanics & Astronomy","FirstCategoryId":"101","ListUrlMain":"https://link.springer.com/article/10.1007/s11433-024-2604-6","RegionNum":1,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"PHYSICS, MULTIDISCIPLINARY","Score":null,"Total":0}
Flow pattern and wave propagation induced by local energy deposition at droplet surface
Interaction between metallic droplets and picosecond laser pre-pulse can shape the droplet into a target more favorable for the main pulse to efficiently generate extreme ultraviolet (EUV) light for nanolithography. After the radiation of the pre-pulse, flow pattern and wave propagation in the droplet are responsible for the deformation and fragmentation of the droplet at a late time. In this study, we numerically investigate the acoustic response and dynamic behaviors of a droplet subjected to a localized heat pulse in the vicinity of the droplet surface, which models the energy deposition of a picosecond (ps) laser pre-pulse. A second-order conservative sharp interface method is adopted to simulate corresponding compressible inviscid two-phase flows. Based on the numerical results, we find that a wave structure of compression-expansion-compression waves propagates in the spherical droplet, and that the asymmetry of the heat source around the droplet surface accounts for the occurrence of the secondary compression wave. Then, we assess the occurrence and propagation of the wave structures, and correlate the wave amplitude with the intensity of the deposited energy. In particular, a theoretical model for the wave propagation is established under the small perturbation assumption, and indicates that the minimum pressure should be inversely proportional to its distance to the droplet center. This theoretical prediction is in good agreement with the numerical results with low intensity of heat source. With the increase of intensity of heat source, the numerical results gradually deviate from the theoretical prediction, because of the failure of the small perturbation assumption at high deposition energy and the effect of asymmetry in geometry on the wave propagation. This study provides an insight into the physical mechanisms of a droplet radiated by a ps laser pulse, which may be helpful in designing the desirable target for efficient laser-induced EUV light generation.
期刊介绍:
Science China Physics, Mechanics & Astronomy, an academic journal cosponsored by the Chinese Academy of Sciences and the National Natural Science Foundation of China, and published by Science China Press, is committed to publishing high-quality, original results in both basic and applied research.
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