液滴表面局部能量沉积诱导的流动模式和波传播

IF 6.4 1区 物理与天体物理 Q1 PHYSICS, MULTIDISCIPLINARY
Zhu-Jun Li, Yi Shen, Hang Ding
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引用次数: 0

摘要

金属液滴与皮秒激光预脉冲的相互作用可以使液滴形成更有利于主脉冲的目标,从而有效地产生极紫外光用于纳米光刻。预脉冲辐射后,液滴内的流态和波传播是造成液滴后期变形和破碎的主要原因。在本研究中,我们通过模拟皮秒(ps)激光预脉冲的能量沉积,数值研究了液滴表面附近局部热脉冲作用下的声响应和动力学行为。采用二阶保守锐界面法模拟相应的可压缩无粘两相流。数值结果表明,压缩-膨胀-压缩波在球形液滴中传播,液滴表面周围热源的不对称性是二次压缩波产生的主要原因。然后,我们评估了波结构的发生和传播,并将波的振幅与沉积能量的强度联系起来。特别地,在小扰动假设下建立了波传播的理论模型,并指出最小压力应与其到液滴中心的距离成反比。该理论预测与热源强度较低时的数值结果吻合较好。随着热源强度的增大,由于高沉积能量下的小摄动假设失效以及几何不对称性对波传播的影响,数值结果逐渐偏离理论预测。该研究揭示了ps激光脉冲辐射液滴的物理机制,有助于设计有效的激光诱导EUV光产生的理想目标。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Flow pattern and wave propagation induced by local energy deposition at droplet surface

Interaction between metallic droplets and picosecond laser pre-pulse can shape the droplet into a target more favorable for the main pulse to efficiently generate extreme ultraviolet (EUV) light for nanolithography. After the radiation of the pre-pulse, flow pattern and wave propagation in the droplet are responsible for the deformation and fragmentation of the droplet at a late time. In this study, we numerically investigate the acoustic response and dynamic behaviors of a droplet subjected to a localized heat pulse in the vicinity of the droplet surface, which models the energy deposition of a picosecond (ps) laser pre-pulse. A second-order conservative sharp interface method is adopted to simulate corresponding compressible inviscid two-phase flows. Based on the numerical results, we find that a wave structure of compression-expansion-compression waves propagates in the spherical droplet, and that the asymmetry of the heat source around the droplet surface accounts for the occurrence of the secondary compression wave. Then, we assess the occurrence and propagation of the wave structures, and correlate the wave amplitude with the intensity of the deposited energy. In particular, a theoretical model for the wave propagation is established under the small perturbation assumption, and indicates that the minimum pressure should be inversely proportional to its distance to the droplet center. This theoretical prediction is in good agreement with the numerical results with low intensity of heat source. With the increase of intensity of heat source, the numerical results gradually deviate from the theoretical prediction, because of the failure of the small perturbation assumption at high deposition energy and the effect of asymmetry in geometry on the wave propagation. This study provides an insight into the physical mechanisms of a droplet radiated by a ps laser pulse, which may be helpful in designing the desirable target for efficient laser-induced EUV light generation.

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来源期刊
Science China Physics, Mechanics & Astronomy
Science China Physics, Mechanics & Astronomy PHYSICS, MULTIDISCIPLINARY-
CiteScore
10.30
自引率
6.20%
发文量
4047
审稿时长
3 months
期刊介绍: Science China Physics, Mechanics & Astronomy, an academic journal cosponsored by the Chinese Academy of Sciences and the National Natural Science Foundation of China, and published by Science China Press, is committed to publishing high-quality, original results in both basic and applied research. Science China Physics, Mechanics & Astronomy, is published in both print and electronic forms. It is indexed by Science Citation Index. Categories of articles: Reviews summarize representative results and achievements in a particular topic or an area, comment on the current state of research, and advise on the research directions. The author’s own opinion and related discussion is requested. Research papers report on important original results in all areas of physics, mechanics and astronomy. Brief reports present short reports in a timely manner of the latest important results.
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