V. V. Privezentsev, A. A. Firsov, V. S. Kulikauskas, M. I. Voronova, D. A. Kiselev, B. R. Senatulin
{"title":"锌注入结晶石英的研究","authors":"V. V. Privezentsev, A. A. Firsov, V. S. Kulikauskas, M. I. Voronova, D. A. Kiselev, B. R. Senatulin","doi":"10.1134/S1027451024702045","DOIUrl":null,"url":null,"abstract":"<p>The results of a study of crystalline quartz implanted by <sup>64</sup>Zn<sup>+</sup> ions with a dose of 5 × 10<sup>16</sup>/cm<sup>2</sup> and an energy of 40 keV are presented. The samples were annealed in air in steps of 100°C for 1 h at each step in the temperature range of 400−700°C. The methods used for the study were atomic force microscopy, X-ray diffraction phase analysis, X-ray photoelectron spectroscopy, and Auger electron spectroscopy. It was found that after implantation, the phases of metallic zinc Zn and carbon C were fixed in the near-surface layer. After annealing at 700°C, the zinc oxide phase ZnO appears, and after annealing above 700°C, the zinc silicide phase Zn<sub>2</sub>SiO<sub>4</sub> appears. It was found that after annealing at 400°C the roughness increases by 2 orders of magnitude compared to the state after implantation, and after annealing at 700°C, the roughness of the quartz surface decreases by an order of magnitude compared to annealing at 400°C. After annealing at 700°C, numerous Zn-containing nanoparticles and craters are fixed on the surface and a zinc silicide phase is formed.</p>","PeriodicalId":671,"journal":{"name":"Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques","volume":"18 1 supplement","pages":"S186 - S192"},"PeriodicalIF":0.5000,"publicationDate":"2025-03-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Study of Zinc Implanted Crystalline Quartz\",\"authors\":\"V. V. Privezentsev, A. A. Firsov, V. S. Kulikauskas, M. I. Voronova, D. A. Kiselev, B. R. Senatulin\",\"doi\":\"10.1134/S1027451024702045\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>The results of a study of crystalline quartz implanted by <sup>64</sup>Zn<sup>+</sup> ions with a dose of 5 × 10<sup>16</sup>/cm<sup>2</sup> and an energy of 40 keV are presented. The samples were annealed in air in steps of 100°C for 1 h at each step in the temperature range of 400−700°C. The methods used for the study were atomic force microscopy, X-ray diffraction phase analysis, X-ray photoelectron spectroscopy, and Auger electron spectroscopy. It was found that after implantation, the phases of metallic zinc Zn and carbon C were fixed in the near-surface layer. After annealing at 700°C, the zinc oxide phase ZnO appears, and after annealing above 700°C, the zinc silicide phase Zn<sub>2</sub>SiO<sub>4</sub> appears. It was found that after annealing at 400°C the roughness increases by 2 orders of magnitude compared to the state after implantation, and after annealing at 700°C, the roughness of the quartz surface decreases by an order of magnitude compared to annealing at 400°C. After annealing at 700°C, numerous Zn-containing nanoparticles and craters are fixed on the surface and a zinc silicide phase is formed.</p>\",\"PeriodicalId\":671,\"journal\":{\"name\":\"Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques\",\"volume\":\"18 1 supplement\",\"pages\":\"S186 - S192\"},\"PeriodicalIF\":0.5000,\"publicationDate\":\"2025-03-17\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://link.springer.com/article/10.1134/S1027451024702045\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"PHYSICS, CONDENSED MATTER\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques","FirstCategoryId":"1085","ListUrlMain":"https://link.springer.com/article/10.1134/S1027451024702045","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, CONDENSED MATTER","Score":null,"Total":0}
The results of a study of crystalline quartz implanted by 64Zn+ ions with a dose of 5 × 1016/cm2 and an energy of 40 keV are presented. The samples were annealed in air in steps of 100°C for 1 h at each step in the temperature range of 400−700°C. The methods used for the study were atomic force microscopy, X-ray diffraction phase analysis, X-ray photoelectron spectroscopy, and Auger electron spectroscopy. It was found that after implantation, the phases of metallic zinc Zn and carbon C were fixed in the near-surface layer. After annealing at 700°C, the zinc oxide phase ZnO appears, and after annealing above 700°C, the zinc silicide phase Zn2SiO4 appears. It was found that after annealing at 400°C the roughness increases by 2 orders of magnitude compared to the state after implantation, and after annealing at 700°C, the roughness of the quartz surface decreases by an order of magnitude compared to annealing at 400°C. After annealing at 700°C, numerous Zn-containing nanoparticles and craters are fixed on the surface and a zinc silicide phase is formed.
期刊介绍：
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques publishes original articles on the topical problems of solid-state physics, materials science, experimental techniques, condensed media, nanostructures, surfaces of thin films, and phase boundaries: geometric and energetical structures of surfaces, the methods of computer simulations; physical and chemical properties and their changes upon radiation and other treatments; the methods of studies of films and surface layers of crystals (XRD, XPS, synchrotron radiation, neutron and electron diffraction, electron microscopic, scanning tunneling microscopic, atomic force microscopic studies, and other methods that provide data on the surfaces and thin films). Articles related to the methods and technics of structure studies are the focus of the journal. The journal accepts manuscripts of regular articles and reviews in English or Russian language from authors of all countries. All manuscripts are peer-reviewed.
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