用于物理和工程的微、纳米电化学加工中的电化学表面处理

IF 2.6 4区 化学 Q3 ELECTROCHEMISTRY
Galina A. Tsirlina
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引用次数: 0

摘要

简要回顾了基于电镀和阳极氧化工艺的微纳制造工艺,强调了与传统电化学表面处理的重叠,以及电化学工具在控制和监测工艺过程中的作用。考虑仅限于制造有序结构和它们的碎片是感兴趣的物理研究,也为相应的设备。本文还介绍了用于此类器件的功能材料(超导、磁性、光学)的电化学制造以及电化学插层的纳米技术应用的进展。这篇综述可以作为电化学微纳米制造的参考书目指南。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Electrochemical surface finishing in miniature—micro and nano electrochemical fabrication for physics and engineering

Electrochemical surface finishing in miniature—micro and nano electrochemical fabrication for physics and engineering

A brief review of micro/nano fabrication procedures based on electroplating and anodic oxidation processes is accenting the overlap with traditional electrochemical surface finishing, and the role of electrochemical tools to control and monitor technological processes. Consideration is limited to fabrication of ordered structures and their fragments being of interest for research in physics, and also for corresponding devices. The review also addresses the progress in electrochemical fabrication of functional materials (superconducting, magnetic, optical) utilized in such devices, and nanotechnological applications of electrochemical intercalation. The review can be considered as a guide to bibliography on electrochemical micro/nano fabrication.

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来源期刊
CiteScore
4.80
自引率
4.00%
发文量
227
审稿时长
4.1 months
期刊介绍: The Journal of Solid State Electrochemistry is devoted to all aspects of solid-state chemistry and solid-state physics in electrochemistry. The Journal of Solid State Electrochemistry publishes papers on all aspects of electrochemistry of solid compounds, including experimental and theoretical, basic and applied work. It equally publishes papers on the thermodynamics and kinetics of electrochemical reactions if at least one actively participating phase is solid. Also of interest are articles on the transport of ions and electrons in solids whenever these processes are relevant to electrochemical reactions and on the use of solid-state electrochemical reactions in the analysis of solids and their surfaces. The journal covers solid-state electrochemistry and focusses on the following fields: mechanisms of solid-state electrochemical reactions, semiconductor electrochemistry, electrochemical batteries, accumulators and fuel cells, electrochemical mineral leaching, galvanic metal plating, electrochemical potential memory devices, solid-state electrochemical sensors, ion and electron transport in solid materials and polymers, electrocatalysis, photoelectrochemistry, corrosion of solid materials, solid-state electroanalysis, electrochemical machining of materials, electrochromism and electrochromic devices, new electrochemical solid-state synthesis. The Journal of Solid State Electrochemistry makes the professional in research and industry aware of this swift progress and its importance for future developments and success in the above-mentioned fields.
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