Nanosecond pulsed multi-hollow surface dielectric barrier discharge for ozone production

Dielectric barrier discharge is effective for generating reactive species, making it particularly suitable for chemical processes such as ozone synthesis. This study investigates ozone production and nitrogen oxides formation in a micro-hollow surface dielectric barrier discharge reactor driven by nanosecond pulses at atmospheric pressure for the first time. Effects of pulse widths (100–1000 ns) and rise times (50–250 ns) on electrical properties, optical emission spectra, and gas-phase products were analyzed. Longer pulse widths enhanced discharge uniformity, raised rotational temperature, and reduced vibrational temperature, while shorter rise times improved ozone efficiency and electron excitation temperature. The peak ozone generation efficiency (57.45 g/Nm³), under varying pulse width and rise time parameters, was achieved with a 1000 ns pulse width and 50 ns rise time, at an energy input of 156.24 J/L. The optimal flow rate of 1 SLM was found to achieve the maximum ozone generation efficiency of 73.94 g/kWh. Nitrogen oxide measurements showed increased NO₂ and N₂O concentrations with pulse width, while rise time had minimal impact. These findings provide valuable insights for designing industrial dielectric barrier discharge ozone generators.