粗糙石英表面的纳米抛光：表面演化的数值计算

IF 4.4 2区物理与天体物理 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Results in Physics Pub Date : 2025-03-03 DOI:10.1016/j.rinp.2025.108187

Vasyl Kanevskii , Serhii Kolienov , Valerii Grygoruk , Ivan Voiteshenko , Oleksandr Stelmakh , Yue Wu , Hao Zhang

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引用次数: 0

摘要

建立了抛光粗糙石英表面的纳米局部光化学蚀刻三维数值模型。该表面以全内反射的临界角从石英面照射。光源为线偏振的激光相干单色辐射，电场强度矢量位于光入射平面内。该模型采用有限元法对亥姆霍兹方程进行数值求解。所提出的模型可以描述粗糙表面的蚀刻演变，并获得亚纳米级的表面粗糙度。计算结果表明，与直接照明相比，使用两个独立的线偏振激光辐射源提供了所需的表面粗糙度水平，并提高了模型的效率。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Nano polishing of a rough quartz surface: Numerical calculation of surface evolution

A numerical 3D model of nano-local photochemical etching for polishing a rough quartz surface has been developed. This surface is illuminated from the quartz side at the critical angle of total internal reflection. The light source is a laser coherent monochromatic radiation with linear polarization, and the electric field strength vector lies in the plane of light incidence. The model uses a numerical solution of the Helmholtz equation using the finite elements method. The proposed model allows to describe the evolution of etching of a rough surface and obtain a subnano-meter level of surface roughness. The results of calculation show that the use of two independent sources of linearly polarized laser radiation provides the required level of surface roughness and increases the efficiency of the model compared to direct illumination.

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来源期刊

Results in Physics MATERIALS SCIENCE, MULTIDISCIPLINARYPHYSIC-PHYSICS, MULTIDISCIPLINARY

CiteScore

8.70

自引率

9.40%

发文量

754

审稿时长

50 days

期刊介绍： Results in Physics is an open access journal offering authors the opportunity to publish in all fundamental and interdisciplinary areas of physics, materials science, and applied physics. Papers of a theoretical, computational, and experimental nature are all welcome. Results in Physics accepts papers that are scientifically sound, technically correct and provide valuable new knowledge to the physics community. Topics such as three-dimensional flow and magnetohydrodynamics are not within the scope of Results in Physics. Results in Physics welcomes three types of papers: 1. Full research papers 2. Microarticles: very short papers, no longer than two pages. They may consist of a single, but well-described piece of information, such as: - Data and/or a plot plus a description - Description of a new method or instrumentation - Negative results - Concept or design study 3. Letters to the Editor: Letters discussing a recent article published in Results in Physics are welcome. These are objective, constructive, or educational critiques of papers published in Results in Physics. Accepted letters will be sent to the author of the original paper for a response. Each letter and response is published together. Letters should be received within 8 weeks of the article''s publication. They should not exceed 750 words of text and 10 references.