三维模拟计算准分子激光腔室的电场分布

IF 1.9 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC
Zhen Wang , Jiayi Chen , Jinbao Liu , Zhihang Zhao , Wenjin Zhang , Yangyang Fu
{"title":"三维模拟计算准分子激光腔室的电场分布","authors":"Zhen Wang ,&nbsp;Jiayi Chen ,&nbsp;Jinbao Liu ,&nbsp;Zhihang Zhao ,&nbsp;Wenjin Zhang ,&nbsp;Yangyang Fu","doi":"10.1016/j.elstat.2025.104058","DOIUrl":null,"url":null,"abstract":"<div><div>The generation of a high-pressure, large-volume, uniform and stable glow discharge is the key technology of the excimer laser, which could be largely affected by the electric field distribution between the electrodes in the discharge chamber. In this work, the spatial distributions of the electric field in an excimer laser discharge chamber with preionization pins (PIPs) are numerically evaluated via a three-dimensional (3D) simulation model. The effects of the number (<span><math><mi>N</mi></math></span>) of pairs of PIPs and their arrangements (symmetrical or staggered) on the inhomogeneity of electric field strength are determined. The results indicate that the presence of PIPs can cause electric field distortion between electrodes, resulting in a wavy distribution. As the number (<span><math><mi>N</mi></math></span>) of pairs of PIPs increases, the electric field strength homogeneity between electrodes can be improved considerably. When the number (<span><math><mi>N</mi></math></span>) of pairs of PIPs is 2 (i.e., <span><math><mrow><mi>N</mi><mo>=</mo><mn>2</mn></mrow></math></span>), the inhomogeneity of the electric field strength (<span><math><mrow><msub><mrow><mi>δ</mi></mrow><mrow><mi>N</mi><mo>=</mo><mn>2</mn><mo>,</mo><mtext>stag</mtext></mrow></msub><mo>=</mo><mn>0</mn><mo>.</mo><mn>183</mn><mtext>%</mtext></mrow></math></span>) with a staggered arrangement is obviously better than that (<span><math><mrow><msub><mrow><mi>δ</mi></mrow><mrow><mi>N</mi><mo>=</mo><mn>2</mn><mo>,</mo><mtext>symm</mtext></mrow></msub><mo>=</mo><mn>0</mn><mo>.</mo><mn>514</mn><mtext>%</mtext></mrow></math></span>) with a symmetrical arrangement. With the PIPs arranged symmetrically, the inhomogeneity of the electric field strength <span><math><mi>δ</mi></math></span> remains below 0.2% when <span><math><mi>N</mi></math></span> <span><math><mo>≥</mo></math></span> 8. These results indicate that the characteristics of the electric field distributions can be influenced by the PIPs in the discharge chamber, which may provide potential insights for the design and optimization of excimer laser devices.</div></div>","PeriodicalId":54842,"journal":{"name":"Journal of Electrostatics","volume":"135 ","pages":"Article 104058"},"PeriodicalIF":1.9000,"publicationDate":"2025-03-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Evaluating the electric field distribution of an excimer laser chamber via three-dimensional simulations\",\"authors\":\"Zhen Wang ,&nbsp;Jiayi Chen ,&nbsp;Jinbao Liu ,&nbsp;Zhihang Zhao ,&nbsp;Wenjin Zhang ,&nbsp;Yangyang Fu\",\"doi\":\"10.1016/j.elstat.2025.104058\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>The generation of a high-pressure, large-volume, uniform and stable glow discharge is the key technology of the excimer laser, which could be largely affected by the electric field distribution between the electrodes in the discharge chamber. In this work, the spatial distributions of the electric field in an excimer laser discharge chamber with preionization pins (PIPs) are numerically evaluated via a three-dimensional (3D) simulation model. The effects of the number (<span><math><mi>N</mi></math></span>) of pairs of PIPs and their arrangements (symmetrical or staggered) on the inhomogeneity of electric field strength are determined. The results indicate that the presence of PIPs can cause electric field distortion between electrodes, resulting in a wavy distribution. As the number (<span><math><mi>N</mi></math></span>) of pairs of PIPs increases, the electric field strength homogeneity between electrodes can be improved considerably. When the number (<span><math><mi>N</mi></math></span>) of pairs of PIPs is 2 (i.e., <span><math><mrow><mi>N</mi><mo>=</mo><mn>2</mn></mrow></math></span>), the inhomogeneity of the electric field strength (<span><math><mrow><msub><mrow><mi>δ</mi></mrow><mrow><mi>N</mi><mo>=</mo><mn>2</mn><mo>,</mo><mtext>stag</mtext></mrow></msub><mo>=</mo><mn>0</mn><mo>.</mo><mn>183</mn><mtext>%</mtext></mrow></math></span>) with a staggered arrangement is obviously better than that (<span><math><mrow><msub><mrow><mi>δ</mi></mrow><mrow><mi>N</mi><mo>=</mo><mn>2</mn><mo>,</mo><mtext>symm</mtext></mrow></msub><mo>=</mo><mn>0</mn><mo>.</mo><mn>514</mn><mtext>%</mtext></mrow></math></span>) with a symmetrical arrangement. With the PIPs arranged symmetrically, the inhomogeneity of the electric field strength <span><math><mi>δ</mi></math></span> remains below 0.2% when <span><math><mi>N</mi></math></span> <span><math><mo>≥</mo></math></span> 8. These results indicate that the characteristics of the electric field distributions can be influenced by the PIPs in the discharge chamber, which may provide potential insights for the design and optimization of excimer laser devices.</div></div>\",\"PeriodicalId\":54842,\"journal\":{\"name\":\"Journal of Electrostatics\",\"volume\":\"135 \",\"pages\":\"Article 104058\"},\"PeriodicalIF\":1.9000,\"publicationDate\":\"2025-03-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Electrostatics\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0304388625000300\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Electrostatics","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0304388625000300","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0

摘要

产生高压、大体积、均匀稳定的辉光放电是准分子激光器的关键技术,而放电室内电极间电场分布对辉光放电的影响很大。本文通过三维模拟模型,对带预电离管脚的准分子激光放电腔内电场的空间分布进行了数值计算。研究了电场强度不均匀性的影响,确定了电场强度对数目(N)及其排列(对称或交错)的影响。结果表明,pip的存在会引起电极之间的电场畸变,产生波浪形分布。随着pip对数目的增加,电极间电场强度的均匀性显著提高。当PIPs对数(N)为2(即N=2)时,交错排列的电场强度(δN=2,stag=0.183%)的不均匀性明显优于对称排列的电场强度(δN=2,symm=0.514%)。当PIPs对称排列时,当N≥8时,电场强度δ的不均匀性保持在0.2%以下。这些结果表明,电场分布特性可能受到放电室内pip的影响,这可能为准分子激光器件的设计和优化提供潜在的见解。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Evaluating the electric field distribution of an excimer laser chamber via three-dimensional simulations
The generation of a high-pressure, large-volume, uniform and stable glow discharge is the key technology of the excimer laser, which could be largely affected by the electric field distribution between the electrodes in the discharge chamber. In this work, the spatial distributions of the electric field in an excimer laser discharge chamber with preionization pins (PIPs) are numerically evaluated via a three-dimensional (3D) simulation model. The effects of the number (N) of pairs of PIPs and their arrangements (symmetrical or staggered) on the inhomogeneity of electric field strength are determined. The results indicate that the presence of PIPs can cause electric field distortion between electrodes, resulting in a wavy distribution. As the number (N) of pairs of PIPs increases, the electric field strength homogeneity between electrodes can be improved considerably. When the number (N) of pairs of PIPs is 2 (i.e., N=2), the inhomogeneity of the electric field strength (δN=2,stag=0.183%) with a staggered arrangement is obviously better than that (δN=2,symm=0.514%) with a symmetrical arrangement. With the PIPs arranged symmetrically, the inhomogeneity of the electric field strength δ remains below 0.2% when N 8. These results indicate that the characteristics of the electric field distributions can be influenced by the PIPs in the discharge chamber, which may provide potential insights for the design and optimization of excimer laser devices.
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来源期刊
Journal of Electrostatics
Journal of Electrostatics 工程技术-工程:电子与电气
CiteScore
4.00
自引率
11.10%
发文量
81
审稿时长
49 days
期刊介绍: The Journal of Electrostatics is the leading forum for publishing research findings that advance knowledge in the field of electrostatics. We invite submissions in the following areas: Electrostatic charge separation processes. Electrostatic manipulation of particles, droplets, and biological cells. Electrostatically driven or controlled fluid flow. Electrostatics in the gas phase.
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