SiC晶圆超精密减薄磨床的设计理念与实现

IF 3.5 2区 工程技术 Q2 ENGINEERING, MANUFACTURING
Tianyu Li, Xianglong Zhu, Renke Kang, Lihao Dai, Meng Li
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引用次数: 0

摘要

随着移动通信、智能驾驶、航空航天等高科技领域的快速发展,对功率半导体器件的性能要求不断提高。碳化硅(SiC)是第三代半导体,由于其优越的材料性能,正在逐渐取代单晶硅(Si)。受SiC高硬度的限制,传统的悬臂结构磨床难以保证SiC晶圆的磨削精度和质量。本文从材料特性和加工要求两方面阐述了超精密减薄磨床的设计理念,开发了一种嵌入式龙门结构的SiC晶圆超精密减薄磨床,并配置了倾角自动调节机构。能够定量调节转台与砂轮主轴之间的相对倾斜角,实现对SiC晶圆总厚度偏差(TTV)的调节。仿真和磨削对比实验表明,与传统悬臂结构磨床相比,所设计的磨床具有更好的动态特性和加工质量。该磨床成功加工出TTV为2.26 μm、粗糙度Sa小于3.8 nm的6英寸SiC晶圆,验证了该设计理念和结构设计能够保证优异的加工性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

The design concept and implementation of ultra-precision thinning grinder for SiC wafers

The design concept and implementation of ultra-precision thinning grinder for SiC wafers
With the rapid development of mobile communications, intelligent driving, aerospace, and other high-tech fields, the performance requirements for power semiconductor devices continue to improve. Silicon carbide (SiC), a third-generation semiconductor, has gradually replaced monocrystalline silicon (Si) due to its superior material properties. Constrained by the high hardness of the SiC, it is hard to guarantee the grinding accuracy and quality of SiC wafers using a traditional grinder with a cantilever structure. Herein, this paper elaborated the design concept of the ultra-precision thinning grinder from two aspects of material characteristics and processing requirements, and developed an ultra-precision thinning grinder for SiC wafers with an embedded gantry structure, and configured an inclination automatic adjustment mechanism, which is capable of quantitatively adjusting the relative tilting angle between the turntable and the grinding wheel spindle to realize the regulation of the total thickness deviation (TTV) of SiC wafers. The simulation and grinding comparison experiments show that the designed grinder has superior dynamic characteristics and machining quality compared to the traditional cantilever structure grinder. The grinder successfully processed 6-inch SiC wafers with a TTV of 2.26 μm and a roughness (Sa) of less than 3.8 nm, verifying that the design concept and structural design can ensure excellent machining performance.
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来源期刊
CiteScore
7.40
自引率
5.60%
发文量
177
审稿时长
46 days
期刊介绍: Precision Engineering - Journal of the International Societies for Precision Engineering and Nanotechnology is devoted to the multidisciplinary study and practice of high accuracy engineering, metrology, and manufacturing. The journal takes an integrated approach to all subjects related to research, design, manufacture, performance validation, and application of high precision machines, instruments, and components, including fundamental and applied research and development in manufacturing processes, fabrication technology, and advanced measurement science. The scope includes precision-engineered systems and supporting metrology over the full range of length scales, from atom-based nanotechnology and advanced lithographic technology to large-scale systems, including optical and radio telescopes and macrometrology.
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