{"title":"多微机械热导检测器混合气体浓度实时传感技术","authors":"Yosuke Akimoto, Ping Wang, Yoshihiko Kurui, Naoya Fujiwara, Naoki Hiramatsu, Fumitaka Ishibashi, Yui Yamazaki, Ryota Kitagawa, Hiroaki Yamazaki, Akihiro Kojima","doi":"10.1002/ecj.12473","DOIUrl":null,"url":null,"abstract":"<div>\n \n <p>This paper presents a new method for fast simultaneous monitoring of individual gas concentrations in a gas mixture by using small micromachined sensors. The developed method uses output data from multiple micromachined thermal conductivity detectors of different sensitivities. We confirmed that the fabricated sensors can accurately determine the concentrations of each of three gases in a mixture. The prototype sensor module was miniaturized to less than 1/72th the size of conventional gas chromatography (GC) equipment. Demonstration tests were conducted in a CO<sub>2</sub> electrolysis cell for CO<sub>2</sub> capture and utilization technologies, and each gas concentration was successfully monitored 176 times faster than conventional GC could for a mixture of H<sub>2</sub>, CO<sub>2</sub>, and CO gases.</p>\n </div>","PeriodicalId":50539,"journal":{"name":"Electronics and Communications in Japan","volume":"108 1","pages":""},"PeriodicalIF":0.5000,"publicationDate":"2025-02-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Real-Time Sensing Technology of Mixed Gas Concentrations Using Multiple Micromachined Thermal Conductivity Detectors\",\"authors\":\"Yosuke Akimoto, Ping Wang, Yoshihiko Kurui, Naoya Fujiwara, Naoki Hiramatsu, Fumitaka Ishibashi, Yui Yamazaki, Ryota Kitagawa, Hiroaki Yamazaki, Akihiro Kojima\",\"doi\":\"10.1002/ecj.12473\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div>\\n \\n <p>This paper presents a new method for fast simultaneous monitoring of individual gas concentrations in a gas mixture by using small micromachined sensors. The developed method uses output data from multiple micromachined thermal conductivity detectors of different sensitivities. We confirmed that the fabricated sensors can accurately determine the concentrations of each of three gases in a mixture. The prototype sensor module was miniaturized to less than 1/72th the size of conventional gas chromatography (GC) equipment. Demonstration tests were conducted in a CO<sub>2</sub> electrolysis cell for CO<sub>2</sub> capture and utilization technologies, and each gas concentration was successfully monitored 176 times faster than conventional GC could for a mixture of H<sub>2</sub>, CO<sub>2</sub>, and CO gases.</p>\\n </div>\",\"PeriodicalId\":50539,\"journal\":{\"name\":\"Electronics and Communications in Japan\",\"volume\":\"108 1\",\"pages\":\"\"},\"PeriodicalIF\":0.5000,\"publicationDate\":\"2025-02-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Electronics and Communications in Japan\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://onlinelibrary.wiley.com/doi/10.1002/ecj.12473\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Electronics and Communications in Japan","FirstCategoryId":"5","ListUrlMain":"https://onlinelibrary.wiley.com/doi/10.1002/ecj.12473","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Real-Time Sensing Technology of Mixed Gas Concentrations Using Multiple Micromachined Thermal Conductivity Detectors
This paper presents a new method for fast simultaneous monitoring of individual gas concentrations in a gas mixture by using small micromachined sensors. The developed method uses output data from multiple micromachined thermal conductivity detectors of different sensitivities. We confirmed that the fabricated sensors can accurately determine the concentrations of each of three gases in a mixture. The prototype sensor module was miniaturized to less than 1/72th the size of conventional gas chromatography (GC) equipment. Demonstration tests were conducted in a CO2 electrolysis cell for CO2 capture and utilization technologies, and each gas concentration was successfully monitored 176 times faster than conventional GC could for a mixture of H2, CO2, and CO gases.
期刊介绍：
Electronics and Communications in Japan (ECJ) publishes papers translated from the Transactions of the Institute of Electrical Engineers of Japan 12 times per year as an official journal of the Institute of Electrical Engineers of Japan (IEEJ). ECJ aims to provide world-class researches in highly diverse and sophisticated areas of Electrical and Electronic Engineering as well as in related disciplines with emphasis on electronic circuits, controls and communications. ECJ focuses on the following fields:
- Electronic theory and circuits,
- Control theory,
- Communications,
- Cryptography,
- Biomedical fields,
- Surveillance,
- Robotics,
- Sensors and actuators,
- Micromachines,
- Image analysis and signal analysis,
- New materials.
For works related to the science, technology, and applications of electric power, please refer to the sister journal Electrical Engineering in Japan (EEJ).
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