Preparation of high-quality polarized grating arrays based on glass surfaces by vibration-assisted nanoimprinting

The present study proposes a method of fabricating polarized gratings using piezoelectric-driven vibration-assisted nanoimprinting, aiming to address the challenges associated with high production costs and lengthy fabrication periods in the optical field. The influence of grating surface material and period on polarized efficiency is analyzed through FDTD. Additionally, the impact of vibration frequency and amplitude on the filling rate is examined. The incorporation of one-dimensional transverse vibration characterized by high frequency and low amplitude during the nanoimprinting process can effectively mitigate resistance encountered in the filling stage, enhance the surface quality of polarized gratings, and optimize photoresist infiltration within the template. The vibration parameters suitable for the vibration-assisted nanoimprint method are determined experimentally and under these parameters, the grating's filling rate is enhanced by 11 %. Finally, it is verified by scanning electron microscopy that the polarized gratings prepared through the vibration-assisted nanoimprinting method have good surface morphology, clear diffracted spots under light source irradiation, and good polarization performance. This study demonstrates that vibration-assisted nanoimprinting has unique cost-effectiveness, and the surface properties of the prepared polarized gratings are great, which provides a new method for the preparation of polarized gratings.