中子辐射诱导缺陷对碳化硅p -本征n二极管浪涌电流稳健性的影响

Electron Pub Date : 2024-10-11 DOI:10.1002/elt2.64
Haoshu Tan, Lin Zhang, Zhiqiang Li, Jun Tao Li, Peng Dong
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引用次数: 0

摘要

浪涌电流(SC)能力是碳化硅(SiC)功率器件可靠性的主要方面之一。本文全面研究了中子辐射缺陷对SiC P-intrinsic-N (PiN)二极管SC性能和可靠性的影响。结果表明,即使中子辐照引起的与碳空位相关的Z1/2和EH6/7缺陷的形成略有增强,二极管的浪涌性能也会下降。令人惊讶的是,发现正向电压(VF)随着SC的增加和辐照二极管中的应力循环而降低,而在SC测试中通常发现应力循环增加,并归因于双极退化(BPD)。通过计算机辅助设计模拟和深能级瞬态光谱表征,发现脉冲应力作用下Z1/2缺陷显著的自热现象通过辐照注入的最近邻和第二近邻碳间隙促进复合而产生退火效应,从而对BPD上VF的降低起主导作用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Impact of neutron radiation induced defects on the surge current robustness of silicon carbide P-intrinsic-N diodes

Impact of neutron radiation induced defects on the surge current robustness of silicon carbide P-intrinsic-N diodes

Surge current (SC) capability is one of the main aspects of reliability for silicon carbide (SiC) power devices. In this work, the influences of neutron radiation-induced defects on the SC capability and reliability of SiC P-intrinsic-N (PiN) diodes were comprehensively investigated. It was found that the surge capability of the diodes can be deteriorated even under the slightly enhanced formation of carbon-vacancy-related Z1/2 and EH6/7 defects introduced by neutron irradiation. Surprisingly, it was found that the forward voltage (VF) decreases with the increased SC and the stress cycles in the irradiated diodes, which is usually found to increase under the SC tests and attributed to the bipolar degradation (BPD). By using technology computer-aided design simulation and deep-level transient spectroscopy characterization, it was found that the significant self-heating during surge stress leads to the annealing effect on the Z1/2 defects through the promoted recombination with the nearest and second neighbor carbon interstitials injected by irradiation, which thus plays a dominant role in the decrease of VF over the BPD.

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