高分辨率x射线微光学：技术与材料

IF 0.4 Q4 PHYSICS, CONDENSED MATTER

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques Pub Date : 2025-03-01 DOI:10.1134/S1027451024701489

I. I. Lyatun, P. N. Medvedskaya, A. S. Korotkov, S. A. Shevyrtalov, S. S. Lyatun, A. A. Snigirev

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引用次数: 0

摘要

讨论了高分辨率x射线微透镜用于相干可视化任务的前景。以激光系统、离子束光刻和增材技术为例，考虑了用于制造二维微透镜的现代微加工技术和方法。评估了各种材料在x射线微光学应用中的效率，并优化了使用离子束光刻系统制造100 nm分辨率微物镜所需的时间。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

High-Resolution X-Ray Micro-Optics: Technologies and Materials

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High-Resolution X-Ray Micro-Optics: Technologies and Materials

The prospects for using high-resolution X-ray microlenses for coherent visualization tasks are discussed. Modern technologies and methods of microprocessing for the manufacture of 2D microlenses are considered using laser systems, ion-beam lithography, and additive technologies as an example. The efficiency of various materials for X-ray micro-optics applications is evaluated, and the time spent on manufacturing 100 nm resolution micro objectives using ion-beam lithography systems is optimized.

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来源期刊

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques PHYSICS, CONDENSED MATTER-

CiteScore

0.90

自引率

25.00%

发文量

144

审稿时长

3-8 weeks

期刊介绍： Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques publishes original articles on the topical problems of solid-state physics, materials science, experimental techniques, condensed media, nanostructures, surfaces of thin films, and phase boundaries: geometric and energetical structures of surfaces, the methods of computer simulations; physical and chemical properties and their changes upon radiation and other treatments; the methods of studies of films and surface layers of crystals (XRD, XPS, synchrotron radiation, neutron and electron diffraction, electron microscopic, scanning tunneling microscopic, atomic force microscopic studies, and other methods that provide data on the surfaces and thin films). Articles related to the methods and technics of structure studies are the focus of the journal. The journal accepts manuscripts of regular articles and reviews in English or Russian language from authors of all countries. All manuscripts are peer-reviewed.