大功率脉冲磁控溅射沉积(CrAlVTiNb)Nx高熵合金氮化膜的表征及磨损作用

IF 6.3 2区 材料科学 Q2 CHEMISTRY, PHYSICAL
Xiaolong Lu , Xiao Zhang , Yan Lu , Cong Wang , Junying Hao , Weimin Liu
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引用次数: 0

摘要

采用高功率脉冲磁控溅射(HiPIMS)沉积(CrAlVTiNb)1-xNx薄膜(x = 0 ~ 0.55), N2流量的变化会影响其微观结构、化学成分、力学性能和摩擦学行为。值得注意的是,当N2流量从0 sccm增加到30 sccm时,膜的形态从柱状变为致密无特征,然后又恢复为柱状,硬度从12 GPa上升到30 GPa,然后下降到25 GPa。在最佳氮气流速(15至25 sccm)下沉积的薄膜具有优异的附着力(LC3临界载荷为45至52 N),在20 sccm下具有优异的耐磨性。此外,该研究还揭示了摩擦氧化磨损和磨料/黏着磨损之间独特的相互作用,这种相互作用在不同密度的薄膜上有所不同。这项研究为工艺参数和薄膜性能之间的关系提供了有价值的见解,为定制薄膜特性以满足特定应用需求提供了一种新的方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Characterization and wear role of (CrAlVTiNb)Nx high-entropy alloy nitride films deposited by high power impulse magnetron sputtering
The (CrAlVTiNb)1-xNx films (x = 0–0.55) are deposited using high power impulse magnetron sputtering (HiPIMS), with variations in N2 flow rate influencing their microstructure, chemical composition, mechanical properties, and tribological behavior. Notably, as the N2 flow rate increases from 0 to 30 sccm, the film undergoes a transformation in morphology from columnar to dense and featureless, before reverting to columnar again, with the hardness initially rising from 12 to 30 GPa and then decreasing to 25 GPa. Films deposited at optimal N2 flow rates (15–25 sccm) exhibit excellent adhesion (LC3 critical loads of 45–52 N), with superior wear resistance achieved at 20 sccm. Additionally, the study reveals a unique interaction between tribo-oxidation wear and abrasive/adhesive wear, which varies across films with different densities. This research provides valuable insights into the relationship between process parameters and film properties, offering a novel approach for tailoring film characteristics to meet specific application demands.
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来源期刊
Journal of Alloys and Compounds
Journal of Alloys and Compounds 工程技术-材料科学:综合
CiteScore
11.10
自引率
14.50%
发文量
5146
审稿时长
67 days
期刊介绍: The Journal of Alloys and Compounds is intended to serve as an international medium for the publication of work on solid materials comprising compounds as well as alloys. Its great strength lies in the diversity of discipline which it encompasses, drawing together results from materials science, solid-state chemistry and physics.
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