Xiaolong Lu , Xiao Zhang , Yan Lu , Cong Wang , Junying Hao , Weimin Liu
{"title":"大功率脉冲磁控溅射沉积(CrAlVTiNb)Nx高熵合金氮化膜的表征及磨损作用","authors":"Xiaolong Lu , Xiao Zhang , Yan Lu , Cong Wang , Junying Hao , Weimin Liu","doi":"10.1016/j.jallcom.2025.179395","DOIUrl":null,"url":null,"abstract":"<div><div>The (CrAlVTiNb)<sub>1-x</sub>N<sub>x</sub> films (x = 0–0.55) are deposited using high power impulse magnetron sputtering (HiPIMS), with variations in N<sub>2</sub> flow rate influencing their microstructure, chemical composition, mechanical properties, and tribological behavior. Notably, as the N<sub>2</sub> flow rate increases from 0 to 30 sccm, the film undergoes a transformation in morphology from columnar to dense and featureless, before reverting to columnar again, with the hardness initially rising from 12 to 30 GPa and then decreasing to 25 GPa. Films deposited at optimal N<sub>2</sub> flow rates (15–25 sccm) exhibit excellent adhesion (L<sub>C3</sub> critical loads of 45–52 N), with superior wear resistance achieved at 20 sccm. Additionally, the study reveals a unique interaction between tribo-oxidation wear and abrasive/adhesive wear, which varies across films with different densities. This research provides valuable insights into the relationship between process parameters and film properties, offering a novel approach for tailoring film characteristics to meet specific application demands.</div></div>","PeriodicalId":344,"journal":{"name":"Journal of Alloys and Compounds","volume":"1020 ","pages":"Article 179395"},"PeriodicalIF":6.3000,"publicationDate":"2025-02-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Characterization and wear role of (CrAlVTiNb)Nx high-entropy alloy nitride films deposited by high power impulse magnetron sputtering\",\"authors\":\"Xiaolong Lu , Xiao Zhang , Yan Lu , Cong Wang , Junying Hao , Weimin Liu\",\"doi\":\"10.1016/j.jallcom.2025.179395\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>The (CrAlVTiNb)<sub>1-x</sub>N<sub>x</sub> films (x = 0–0.55) are deposited using high power impulse magnetron sputtering (HiPIMS), with variations in N<sub>2</sub> flow rate influencing their microstructure, chemical composition, mechanical properties, and tribological behavior. Notably, as the N<sub>2</sub> flow rate increases from 0 to 30 sccm, the film undergoes a transformation in morphology from columnar to dense and featureless, before reverting to columnar again, with the hardness initially rising from 12 to 30 GPa and then decreasing to 25 GPa. Films deposited at optimal N<sub>2</sub> flow rates (15–25 sccm) exhibit excellent adhesion (L<sub>C3</sub> critical loads of 45–52 N), with superior wear resistance achieved at 20 sccm. Additionally, the study reveals a unique interaction between tribo-oxidation wear and abrasive/adhesive wear, which varies across films with different densities. This research provides valuable insights into the relationship between process parameters and film properties, offering a novel approach for tailoring film characteristics to meet specific application demands.</div></div>\",\"PeriodicalId\":344,\"journal\":{\"name\":\"Journal of Alloys and Compounds\",\"volume\":\"1020 \",\"pages\":\"Article 179395\"},\"PeriodicalIF\":6.3000,\"publicationDate\":\"2025-02-25\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Alloys and Compounds\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0925838825009533\",\"RegionNum\":2,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"CHEMISTRY, PHYSICAL\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Alloys and Compounds","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0925838825009533","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"CHEMISTRY, PHYSICAL","Score":null,"Total":0}
Characterization and wear role of (CrAlVTiNb)Nx high-entropy alloy nitride films deposited by high power impulse magnetron sputtering
The (CrAlVTiNb)1-xNx films (x = 0–0.55) are deposited using high power impulse magnetron sputtering (HiPIMS), with variations in N2 flow rate influencing their microstructure, chemical composition, mechanical properties, and tribological behavior. Notably, as the N2 flow rate increases from 0 to 30 sccm, the film undergoes a transformation in morphology from columnar to dense and featureless, before reverting to columnar again, with the hardness initially rising from 12 to 30 GPa and then decreasing to 25 GPa. Films deposited at optimal N2 flow rates (15–25 sccm) exhibit excellent adhesion (LC3 critical loads of 45–52 N), with superior wear resistance achieved at 20 sccm. Additionally, the study reveals a unique interaction between tribo-oxidation wear and abrasive/adhesive wear, which varies across films with different densities. This research provides valuable insights into the relationship between process parameters and film properties, offering a novel approach for tailoring film characteristics to meet specific application demands.
期刊介绍:
The Journal of Alloys and Compounds is intended to serve as an international medium for the publication of work on solid materials comprising compounds as well as alloys. Its great strength lies in the diversity of discipline which it encompasses, drawing together results from materials science, solid-state chemistry and physics.