透明导电氧化物/金属/氧化物三层结构的层间界面特征

IF 0.6 4区 材料科学 Q4 CRYSTALLOGRAPHY
A. Sh. Asvarov, A. K. Akhmedov, E. K. Murliev, A. Kh. Abduev, V. M. Kanevsky
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引用次数: 0

摘要

采用射频磁控溅射法,在50℃氩气条件下合成了不同成分的氧化物/金属/氧化物三层结构,对其生长过程、微观结构和电学特性进行了比较研究。研究了随后在开放气氛中退火对结构电导率的影响。利用透射电子显微镜和能量色散x射线光谱学研究了退火后结构中化学元素的微观结构和分布的变化。根据所得结果,提出了层间界面转变的机制和结构中载流子输运的条件,这取决于氧化物和组成它们的金属层的组成。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Features of Interlayer Interfaces in Transparent Conducting Oxide/Metal/Oxide Trilayer Structures

Features of Interlayer Interfaces in Transparent Conducting Oxide/Metal/Oxide Trilayer Structures

A comparative study of the growth processes, microstructures, and electrical characteristics of oxide/metal/oxide trilayer structures of different compositions synthesized at 50°C by rf magnetron sputtering in argon has been performed. The effect of subsequent annealing in an open atmosphere on the conductivity of the structures has been investigated. Transmission electron microscopy and energy-dispersive X-ray spectroscopy have been used to examine changes in the microstructure and profiles of distribution of chemical elements included in the structures under annealing. Based on the results obtained, mechanisms have been proposed for the transformation of interlayer interfaces and conditions of carrier transport in the structures, depending on the composition of the oxide and metallic layers comprising them.

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来源期刊
Crystallography Reports
Crystallography Reports 化学-晶体学
CiteScore
1.10
自引率
28.60%
发文量
96
审稿时长
4-8 weeks
期刊介绍: Crystallography Reports is a journal that publishes original articles short communications, and reviews on various aspects of crystallography: diffraction and scattering of X-rays, electrons, and neutrons, determination of crystal structure of inorganic and organic substances, including proteins and other biological substances; UV-VIS and IR spectroscopy; growth, imperfect structure and physical properties of crystals; thin films, liquid crystals, nanomaterials, partially disordered systems, and the methods of studies.
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