A hybrid single quantum dot coupled cavity on a CMOS-compatible SiC photonic chip for Purcell-enhanced deterministic single-photon emission

The ability to control nonclassical light emission from a single quantum emitter by an integrated cavity may unleash new perspectives for integrated photonic quantum applications. However, coupling a single quantum emitter to cavity within photonic circuitry towards creation of the Purcell-enhanced single-photon emission is elusive due to the complexity of integrating active devices in low-loss photonic circuits. Here we demonstrate a hybrid micro-ring resonator (HMRR) coupled with self-assembled quantum dots (QDs) for cavity-enhanced deterministic single-photon emission. The HMRR cavity supports whispering-gallery modes with quality factors up to 7.8×10³. By further introducing a micro-heater, we show that the photon emission of QDs can be locally and dynamically tuned over one free spectral ranges of the HMRR ( ~ 4 nm). This allows precise tuning of individual QDs in resonance with the cavity modes, thereby enhancing single-photon emission with a Purcell factor of about 4.9. Our results on the hybrid integrated cavities coupled with two-level quantum emitters emerge as promising devices for chip-based scalable photonic quantum applications.