Tong Xu , Shulin Sha , Kai Tang , Xuefeng Fan , Jinguo Liu , Caixia Kan , Gangyi Zhu , Feifei Qin , Daning Shi , Mingming Jiang
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引用次数: 0
摘要
片上集成光电探测器具有小型化、高集成度、高可靠性等优点,是电子器件和系统中不可缺少的重要组成部分。在此,我们通过实验展示了一种单片集成的紫外探测器,该探测器利用硅晶片上的GaN微柱外延结构,通过特定尺寸的Pt纳米颗粒等离子体提高了其光响应性能。当偏置为0 V的紫外光照射时,Pt/GaN器件表现出显著的光伏性能,包括200.1 mA W−1的峰值响应度,65%的外量子效率和其他性能指标。有限元分析和能带理论证实,Pt/GaN器件优异的光探测性能与强等离子体吸收和注入GaN导带的热电子的增加有关,这大大提高了其光响应性能和应用中的鲁棒性。为了实现器件的多用途能力,我们验证了Pt/GaN作为浊度传感的应用,并实现了高达100 NTU的分辨率。此外,所制备的器件还可以用作光通信的光数据接收器。这些发现为片上检测器提高系统整体性能和促进更复杂应用的实现提供了参考。
The advantages of on-chip integrated photodetectors, such as miniaturization, high integration, and reliability, make them an indispensable and important part of electronic devices and systems. Herein, we experimentally exhibited a monolithically integrated ultraviolet photodetector utilizing GaN microcylinder epitaxial structure on Si wafer, with its photoresponse properties plasmonically boosted using Pt nanoparticles via specific sizes. When illuminated upon ultraviolet light at 0 V bias, the Pt/GaN device exhibits significant photovoltaic performances, including a peak responsivity of 200.1 mA W−1, external quantum efficiency of 65%, and other figures-of-merit. Finite element analysis and energy band theory confirm that the excellent photodetection properties of the Pt/GaN device are related to the strong plasmon absorption and the increase of hot electrons injected into the GaN conduction band, which considerably improves its photoresponse performance and robustness in application. To realize the multipurpose capability of the devices, we validated the application of Pt/GaN as turbidity sensing and achieved a resolution of up to 100 NTU. Moreover, the prepared devices can be used as optical data receivers for optical communication. These findings provide references for on-chip detectors to improve the overall system performance and promote the realization of more complex applications.