{"title":"基于cuo修饰Fe₂O₃纳米结构的快速、灵敏、小型化温度传感器","authors":"Hamid Reza Ansari;Zoheir Kordrostami;Ali Mirzaei;Michael Kraft","doi":"10.1109/JSEN.2024.3516201","DOIUrl":null,"url":null,"abstract":"In this research, highly sensitive temperature sensors based on copper oxide (CuO)-decorated iron oxide (Fe2O3) nanostructures (NSs) were successfully fabricated. The Fe2O3 NSs were synthesized through a facile for 12 h at <inline-formula> <tex-math>$200~^{\\circ }$ </tex-math></inline-formula>C hydrothermal method, and subsequently, they were coated on an alumina substrate equipped with Pt electrodes. Then, thin layers (5, 10, 50, and 100 nm) of Cu were decorated on the Fe2O3 NSs by sputtering device and annealing at <inline-formula> <tex-math>$400~^{\\circ }$ </tex-math></inline-formula>C for 1 h, CuO-decorated Fe2O3 NSs temperature sensors were prepared. After extracting the results, it was found that the sensor with 5-nm CuO decoration has the best performance. Using an integrated microheater, the sensor temperature was controlled. Upon variation of the temperature, resistance was changed and the sensor was able to detect temperature variations in the range of <inline-formula> <tex-math>$30~^{\\circ }$ </tex-math></inline-formula>C–<inline-formula> <tex-math>$140~^{\\circ }$ </tex-math></inline-formula>C. The temperature has been detected from the ambient temperature to <inline-formula> <tex-math>$140~^{\\circ }$ </tex-math></inline-formula>C. It showed a temperature coefficient ratio (TCR) of -0.9% °C<inline-formula> <tex-math>$^{-{1}}$ </tex-math></inline-formula> and a sensitivity of -107.19 M<inline-formula> <tex-math>$\\Omega ~^{\\circ }$ </tex-math></inline-formula>C<inline-formula> <tex-math>$^{-{1}}$ </tex-math></inline-formula>, which demonstrated the highly sensitive nature of the developed sensor. Furthermore, it showed fast dynamics along with high stability. The results demonstrate the possibility of the realization of a highly sensitive and portable temperature sensor using CuO-decorated Fe2O3 NSs.","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":"25 3","pages":"4227-4235"},"PeriodicalIF":4.3000,"publicationDate":"2024-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Fast, Sensitive, and Miniaturized Temperature Sensor Based on CuO-Decorated Fe₂O₃ Nanostructures\",\"authors\":\"Hamid Reza Ansari;Zoheir Kordrostami;Ali Mirzaei;Michael Kraft\",\"doi\":\"10.1109/JSEN.2024.3516201\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this research, highly sensitive temperature sensors based on copper oxide (CuO)-decorated iron oxide (Fe2O3) nanostructures (NSs) were successfully fabricated. The Fe2O3 NSs were synthesized through a facile for 12 h at <inline-formula> <tex-math>$200~^{\\\\circ }$ </tex-math></inline-formula>C hydrothermal method, and subsequently, they were coated on an alumina substrate equipped with Pt electrodes. Then, thin layers (5, 10, 50, and 100 nm) of Cu were decorated on the Fe2O3 NSs by sputtering device and annealing at <inline-formula> <tex-math>$400~^{\\\\circ }$ </tex-math></inline-formula>C for 1 h, CuO-decorated Fe2O3 NSs temperature sensors were prepared. After extracting the results, it was found that the sensor with 5-nm CuO decoration has the best performance. Using an integrated microheater, the sensor temperature was controlled. Upon variation of the temperature, resistance was changed and the sensor was able to detect temperature variations in the range of <inline-formula> <tex-math>$30~^{\\\\circ }$ </tex-math></inline-formula>C–<inline-formula> <tex-math>$140~^{\\\\circ }$ </tex-math></inline-formula>C. The temperature has been detected from the ambient temperature to <inline-formula> <tex-math>$140~^{\\\\circ }$ </tex-math></inline-formula>C. It showed a temperature coefficient ratio (TCR) of -0.9% °C<inline-formula> <tex-math>$^{-{1}}$ </tex-math></inline-formula> and a sensitivity of -107.19 M<inline-formula> <tex-math>$\\\\Omega ~^{\\\\circ }$ </tex-math></inline-formula>C<inline-formula> <tex-math>$^{-{1}}$ </tex-math></inline-formula>, which demonstrated the highly sensitive nature of the developed sensor. Furthermore, it showed fast dynamics along with high stability. The results demonstrate the possibility of the realization of a highly sensitive and portable temperature sensor using CuO-decorated Fe2O3 NSs.\",\"PeriodicalId\":447,\"journal\":{\"name\":\"IEEE Sensors Journal\",\"volume\":\"25 3\",\"pages\":\"4227-4235\"},\"PeriodicalIF\":4.3000,\"publicationDate\":\"2024-12-19\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Sensors Journal\",\"FirstCategoryId\":\"103\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/10807110/\",\"RegionNum\":2,\"RegionCategory\":\"综合性期刊\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Sensors Journal","FirstCategoryId":"103","ListUrlMain":"https://ieeexplore.ieee.org/document/10807110/","RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
摘要
本研究成功制备了基于氧化铜(CuO)修饰的氧化铁(Fe2O3)纳米结构(NSs)的高灵敏度温度传感器。采用$200~^{\circ}$ C水热法制备了Fe2O3纳米碳化硅12 h,然后将其涂覆在带有Pt电极的氧化铝基体上。然后通过溅射装置在Fe2O3 NSs表面镀上5、10、50和100 nm的Cu薄层,并在$400~^{\circ}$ C下退火1 h,制备cuo修饰的Fe2O3 NSs温度传感器。提取结果后,发现5nm CuO装饰的传感器性能最好。利用集成微加热器控制传感器温度。随着温度的变化,电阻发生变化,传感器能够检测到$30~^{\circ}$ C ~ $140~^{\circ}$ C范围内的温度变化。从环境温度到$140~^{\circ}$ C的温度系数比(TCR)为-0.9%°C $^{-{1}}$,灵敏度为-107.19 M $\Omega ~^{\circ}$ C $^{-{1}}$,表明了所开发传感器的高灵敏度。此外,它具有快速动态和高稳定性。结果表明,利用cuo修饰的Fe2O3 NSs实现高灵敏度和便携式温度传感器是可能的。
Fast, Sensitive, and Miniaturized Temperature Sensor Based on CuO-Decorated Fe₂O₃ Nanostructures
In this research, highly sensitive temperature sensors based on copper oxide (CuO)-decorated iron oxide (Fe2O3) nanostructures (NSs) were successfully fabricated. The Fe2O3 NSs were synthesized through a facile for 12 h at $200~^{\circ }$ C hydrothermal method, and subsequently, they were coated on an alumina substrate equipped with Pt electrodes. Then, thin layers (5, 10, 50, and 100 nm) of Cu were decorated on the Fe2O3 NSs by sputtering device and annealing at $400~^{\circ }$ C for 1 h, CuO-decorated Fe2O3 NSs temperature sensors were prepared. After extracting the results, it was found that the sensor with 5-nm CuO decoration has the best performance. Using an integrated microheater, the sensor temperature was controlled. Upon variation of the temperature, resistance was changed and the sensor was able to detect temperature variations in the range of $30~^{\circ }$ C–$140~^{\circ }$ C. The temperature has been detected from the ambient temperature to $140~^{\circ }$ C. It showed a temperature coefficient ratio (TCR) of -0.9% °C$^{-{1}}$ and a sensitivity of -107.19 M$\Omega ~^{\circ }$ C$^{-{1}}$ , which demonstrated the highly sensitive nature of the developed sensor. Furthermore, it showed fast dynamics along with high stability. The results demonstrate the possibility of the realization of a highly sensitive and portable temperature sensor using CuO-decorated Fe2O3 NSs.
期刊介绍:
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