{"title":"一种用于近红外光探测的双漏垂直TFET光敏器的光学性能增强","authors":"Chinna Baji Shaik, Chandan Kumar Pandey","doi":"10.1016/j.micrna.2024.208051","DOIUrl":null,"url":null,"abstract":"<div><div>This paper details the optical performance of a dual-drain vertical TFET (DDV-TFET) based photosensor designed for light detection in the near-infrared (NIR) region (0.7–1.0 μm), employing silicon with N<sup>+</sup> doping as the photosensing gate. The optical performance of DDV-TFET photosensor is assessed by observing the variations in energy band diagram, optical voltage and band-to-band tunnelling rate of the charge carriers under both Light and dark conditions. The incorporation of N<sup>+</sup> pockets and back gate facilitates an increased tunneling rate of charge carriers at the source-channel interface, thereby enhancing the modulation of the channel behavior when light is absorbed inside the photosensing gate. The presented DDV-TFET photosensor demonstrates enhanced optical performance when detecting light at low illumination intensity of 0.5 W/cm<sup>2</sup> incident on the photosensing gate. TCAD-based simulation results reveal that silicon photosensing gate with an optimal thickness of 20 nm and a pocket doping concentration of 1 × 10<sup>19</sup> cm<sup>−3</sup> achieves a sensitivity of 3.59 × 10<sup>5</sup>, a responsivity of 14.8 A/W, a detectivity of 5 × 10<sup>11</sup> Jones and a signal-to-noise ratio (SNR) of 111 dB when detecting incident light in the NIR range. Furthermore, the optical performance of DDV-TFET based photosensor is observed for different <span><math><mrow><mi>k</mi></mrow></math></span>-value of gate oxide and germanium as source material, which reveals that low-<em>k</em> gate oxide offers higher sensitivity and SNR. Conversely, utilizing low band gap source material causes degradation in the sensitivity and SNR of the investigated photosensor.</div></div>","PeriodicalId":100923,"journal":{"name":"Micro and Nanostructures","volume":"198 ","pages":"Article 208051"},"PeriodicalIF":2.7000,"publicationDate":"2025-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Enhanced optical performance of a dual-drain vertical TFET photosensor for near-infrared light detection\",\"authors\":\"Chinna Baji Shaik, Chandan Kumar Pandey\",\"doi\":\"10.1016/j.micrna.2024.208051\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>This paper details the optical performance of a dual-drain vertical TFET (DDV-TFET) based photosensor designed for light detection in the near-infrared (NIR) region (0.7–1.0 μm), employing silicon with N<sup>+</sup> doping as the photosensing gate. The optical performance of DDV-TFET photosensor is assessed by observing the variations in energy band diagram, optical voltage and band-to-band tunnelling rate of the charge carriers under both Light and dark conditions. The incorporation of N<sup>+</sup> pockets and back gate facilitates an increased tunneling rate of charge carriers at the source-channel interface, thereby enhancing the modulation of the channel behavior when light is absorbed inside the photosensing gate. The presented DDV-TFET photosensor demonstrates enhanced optical performance when detecting light at low illumination intensity of 0.5 W/cm<sup>2</sup> incident on the photosensing gate. TCAD-based simulation results reveal that silicon photosensing gate with an optimal thickness of 20 nm and a pocket doping concentration of 1 × 10<sup>19</sup> cm<sup>−3</sup> achieves a sensitivity of 3.59 × 10<sup>5</sup>, a responsivity of 14.8 A/W, a detectivity of 5 × 10<sup>11</sup> Jones and a signal-to-noise ratio (SNR) of 111 dB when detecting incident light in the NIR range. Furthermore, the optical performance of DDV-TFET based photosensor is observed for different <span><math><mrow><mi>k</mi></mrow></math></span>-value of gate oxide and germanium as source material, which reveals that low-<em>k</em> gate oxide offers higher sensitivity and SNR. Conversely, utilizing low band gap source material causes degradation in the sensitivity and SNR of the investigated photosensor.</div></div>\",\"PeriodicalId\":100923,\"journal\":{\"name\":\"Micro and Nanostructures\",\"volume\":\"198 \",\"pages\":\"Article 208051\"},\"PeriodicalIF\":2.7000,\"publicationDate\":\"2025-02-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Micro and Nanostructures\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S2773012324003017\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"PHYSICS, CONDENSED MATTER\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Micro and Nanostructures","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S2773012324003017","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"PHYSICS, CONDENSED MATTER","Score":null,"Total":0}
Enhanced optical performance of a dual-drain vertical TFET photosensor for near-infrared light detection
This paper details the optical performance of a dual-drain vertical TFET (DDV-TFET) based photosensor designed for light detection in the near-infrared (NIR) region (0.7–1.0 μm), employing silicon with N+ doping as the photosensing gate. The optical performance of DDV-TFET photosensor is assessed by observing the variations in energy band diagram, optical voltage and band-to-band tunnelling rate of the charge carriers under both Light and dark conditions. The incorporation of N+ pockets and back gate facilitates an increased tunneling rate of charge carriers at the source-channel interface, thereby enhancing the modulation of the channel behavior when light is absorbed inside the photosensing gate. The presented DDV-TFET photosensor demonstrates enhanced optical performance when detecting light at low illumination intensity of 0.5 W/cm2 incident on the photosensing gate. TCAD-based simulation results reveal that silicon photosensing gate with an optimal thickness of 20 nm and a pocket doping concentration of 1 × 1019 cm−3 achieves a sensitivity of 3.59 × 105, a responsivity of 14.8 A/W, a detectivity of 5 × 1011 Jones and a signal-to-noise ratio (SNR) of 111 dB when detecting incident light in the NIR range. Furthermore, the optical performance of DDV-TFET based photosensor is observed for different -value of gate oxide and germanium as source material, which reveals that low-k gate oxide offers higher sensitivity and SNR. Conversely, utilizing low band gap source material causes degradation in the sensitivity and SNR of the investigated photosensor.