一种用于近红外光探测的双漏垂直TFET光敏器的光学性能增强

IF 2.7 Q2 PHYSICS, CONDENSED MATTER
Chinna Baji Shaik, Chandan Kumar Pandey
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引用次数: 0

摘要

本文详细介绍了一种用于近红外(NIR)区域(0.7 ~ 1.0 μm)光探测的双漏型垂直TFET (DDV-TFET)光传感器的光学性能,该传感器采用掺杂N+的硅作为光敏栅极。通过观察在光照和黑暗条件下载流子的能带图、光电压和带间隧穿速率的变化来评价DDV-TFET光传感器的光学性能。N+口袋和后门的结合促进了源-通道界面电荷载流子隧穿速率的增加,从而增强了光在光敏栅内吸收时通道行为的调制。所制备的DDV-TFET光敏器件在检测入射光强度为0.5 W/cm2的低照度光时,具有较好的光学性能。基于tcad的仿真结果表明,当硅光敏栅极的最佳厚度为20 nm,掺杂浓度为1 × 1019 cm−3时,对近红外入射光的探测灵敏度为3.59 × 105,响应率为14.8 a /W,探测率为5 × 1011 Jones,信噪比为111 dB。此外,在不同k值的栅极氧化物和锗作为源材料时,对基于DDV-TFET的光电传感器的光学性能进行了观察,发现低k值的栅极氧化物具有更高的灵敏度和信噪比。相反,使用低带隙源材料会导致所研究光敏器的灵敏度和信噪比下降。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Enhanced optical performance of a dual-drain vertical TFET photosensor for near-infrared light detection
This paper details the optical performance of a dual-drain vertical TFET (DDV-TFET) based photosensor designed for light detection in the near-infrared (NIR) region (0.7–1.0 μm), employing silicon with N+ doping as the photosensing gate. The optical performance of DDV-TFET photosensor is assessed by observing the variations in energy band diagram, optical voltage and band-to-band tunnelling rate of the charge carriers under both Light and dark conditions. The incorporation of N+ pockets and back gate facilitates an increased tunneling rate of charge carriers at the source-channel interface, thereby enhancing the modulation of the channel behavior when light is absorbed inside the photosensing gate. The presented DDV-TFET photosensor demonstrates enhanced optical performance when detecting light at low illumination intensity of 0.5 W/cm2 incident on the photosensing gate. TCAD-based simulation results reveal that silicon photosensing gate with an optimal thickness of 20 nm and a pocket doping concentration of 1 × 1019 cm−3 achieves a sensitivity of 3.59 × 105, a responsivity of 14.8 A/W, a detectivity of 5 × 1011 Jones and a signal-to-noise ratio (SNR) of 111 dB when detecting incident light in the NIR range. Furthermore, the optical performance of DDV-TFET based photosensor is observed for different k-value of gate oxide and germanium as source material, which reveals that low-k gate oxide offers higher sensitivity and SNR. Conversely, utilizing low band gap source material causes degradation in the sensitivity and SNR of the investigated photosensor.
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6.50
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