提高氧化钇薄膜中击穿场强超过实验标度规律的策略。

IF 10.7 2区材料科学 Q1 CHEMISTRY, MULTIDISCIPLINARY

Materials Horizons Pub Date : 2025-01-30 DOI:10.1039/D4MH01524J

Tomohiko Nakajima, Yuuki Kitanaka, Iwao Yamaguchi, Kazuhiro Kumagai, Junichi Nomoto, Masayuki Fukuda and Ryohei Hokari

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引用次数: 0

摘要

为了提高氧化钇薄膜的介电击穿场强（Ebf），应用于半导体制造，提出了一种基于光辅助化学溶液沉积的氧化钇薄膜的合成策略，以制备具有极小纳米晶体聚集体的氧化钇薄膜。尽管含有许多椭圆孔，但薄膜的Ebf仍超过12.7 MV cm-1，远高于常规实验标度定律预测的Ebf。纳米晶团聚体与椭圆孔（通常被认为是缺陷）的结合，为提高Ebf提供了一种新的策略。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

A strategy for increasing the breakdown field strength beyond the experimental scaling law in yttria films†

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A strategy for increasing the breakdown field strength beyond the experimental scaling law in yttria films†

Aiming to increase the dielectric breakdown field strength (E_bf) of yttria films for application in semiconductor manufacturing, a synthetic strategy based on photo-assisted chemical solution deposition was developed to prepare yttria films with aggregates of very small nanocrystallites. Despite containing many elliptical pores, the films exhibited an E_bf exceeding 12.7 MV cm⁻¹, much higher than that predicted according to conventional experimental scaling laws. The combination of nanocrystallite agglomerates and elliptical pores, generally seen as defects, provides a new strategy for increasing the E_bf.

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来源期刊

Materials Horizons CHEMISTRY, MULTIDISCIPLINARY-MATERIALS SCIENCE, MULTIDISCIPLINARY

CiteScore

18.90

自引率

2.30%

发文量

306

审稿时长

1.3 months

期刊介绍： Materials Horizons is a leading journal in materials science that focuses on publishing exceptionally high-quality and innovative research. The journal prioritizes original research that introduces new concepts or ways of thinking, rather than solely reporting technological advancements. However, groundbreaking articles featuring record-breaking material performance may also be published. To be considered for publication, the work must be of significant interest to our community-spanning readership. Starting from 2021, all articles published in Materials Horizons will be indexed in MEDLINE©. The journal publishes various types of articles, including Communications, Reviews, Opinion pieces, Focus articles, and Comments. It serves as a core journal for researchers from academia, government, and industry across all areas of materials research. Materials Horizons is a Transformative Journal and compliant with Plan S. It has an impact factor of 13.3 and is indexed in MEDLINE.