点逐点印刷电容器升降机

Stefan Lux, Nadezda Kuznetsova, Ajeya R. Simha, Dario Mager, Frank Breitling, Jan G. Korvink
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引用次数: 0

摘要

电容器在现代电子学中起着至关重要的作用,广泛应用于能量存储、信号处理、射频调谐和匹配以及信号滤波等领域。本文提出了一种利用激光诱导前向转移(LIFT)技术制造芯片级电容器的新方法,这是一种多功能3D打印方法,为传统制造工艺提供了一种灵活且具有成本效益的替代方案。采用二氧化钛和银浆层逐点印刷的方法制备了平板电容器,并对其性能进行了评价。当打印参数为120 mW,打印时间为4 ms时,在直径为130 μ ${\rm{\mu }}$ m处获得了最佳的点圆度,且表面无明显缺陷。使用更小的点可以提高分辨率,但这损害了印刷表面的质量。制造的电容器在100 MHz时的平均容量为40.1±$\pm $ 2.2 pF,也适用于高频应用。印刷银道的电阻率为1.2 × 10−7Ω m $1.2\,\times \,1{0}^{-7}\,{\rm{\Omega }}{\rm{m}}$,测量了16个结构,并与制造商对银墨水的规格非常匹配。与以前报道的使用方形传输几何形状的结果相比,本文中使用的逐点方法获得的分辨率在传输中提供了更大的灵活性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Dot-by-Dot Printing of Capacitors by Lift

Dot-by-Dot Printing of Capacitors by Lift

Capacitors play a crucial role in modern electronics as they are widely employed for energy storage, signal processing, radiofrequency tuning and matching, and signal filtering. This paper presents a novel approach to chip-scale capacitor fabrication utilizing the laser-induced forward transfer (LIFT) technique, a versatile 3D printing method that offers a flexible and cost-effective alternative to conventional manufacturing processes. Plate capacitors were fabricated through dot-by-dot printing of titanium di-oxide and silver paste layers, and their performance evaluated. Optimal dot circularity at a diameter of 130 μ ${\rm{\mu }}$ m were achieved with printing parameters of 120 mW for 4 ms, with no noticeable surface defects. Using smaller dots enabled higher resolution, but this compromised the quality of the printed surface. The fabricated capacitors demonstrated a mean capacity of 40.1  ± $\pm $  2.2 pF at 100 MHz, making them suitable also for high-frequency applications. The resistivity of the printed silver tracks was 1.2 × 1 0 7 Ω m $1.2\,\times \,1{0}^{-7}\,{\rm{\Omega }}{\rm{m}}$ , measured over 16 structures, and closely matched the manufacturer's specifications for the silver ink. The achieved resolution from the dot-by-dot method used in this paper provided greater flexibility in transfer in comparison to previously reported results using a square-shaped transfer geometry.

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