Sb2Se3集成光子器件研究进展

Xiaojun Chen, Jiao Lin, Ke Wang
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引用次数: 0

摘要

硅光子技术是光子集成电路的一个非常有前途的选择,并引起了广泛的兴趣,特别是因为它可以利用互补的金属氧化物半导体加工技术和设施,从而实现低成本的高密度光子集成。热光效应和载流子色散效应是调谐硅光子器件的典型手段,但由于其折射率变化小、相对较弱且易挥发,带来了高功耗和大器件尺寸的缺点。为了克服这些缺点,相变材料被引入到硅光子器件中,其中VO2和Ge2Sb2Te5是最常用的材料。然而,它们的主要缺点是损耗大,限制了集成光子器件性能的进一步提高。因此,Sb2Se3最近在硅光子集成器件的设计中越来越受到关注,得益于其在c波段上极低的损耗和非易失性的优势。本文系统综述了基于Sb2Se3集成光器件的最新研究动态,并根据器件功能对其进行了分类。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

A Review of Integrated Photonic Devices Using Sb2Se3

A Review of Integrated Photonic Devices Using Sb2Se3

The silicon photonic technology is a highly promising option for photonic integrated circuits and has attracted intensive interests, particularly since it can utilize complementary metal-oxide-semiconductor processing techniques and facilities, thereby realizing high-density photonic integrations with low-cost. Unfortunately, the thermo-optic and the carrier dispersion effects, which are the typical means of tuning silicon photonics devices, bring the drawbacks of high power consumption and large device size due to the relatively weak effect with a small refractive index change and being volatile. For overcoming these drawbacks, phase-change materials are introduced into silicon photonic devices, where VO2 and Ge2Sb2Te5 are the most commonly used ones. However, the key disadvantage of large loss resulting from them limits further improving the performances of integrated photonic devices. Therefore, Sb2Se3 has seen increasing interests recently in the design of silicon photonic integrated devices, benefiting from the advantages of having extremely low loss over the C-band and being non-volatile. In this paper, the trending recent studies about integrated optical devices are systematically reviewed using Sb2Se3, which are classified according to the device function.

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