氮化法合成氮化镓纳米粉末:用于紫外检测的氮化镓薄膜的制备和表征

Mahdi Hajimazdarani , Peyman Yaghoubizadeh , Ali Jafari , Ali Kenarsari Moghadam , Mojtaba Hajimazdarani , Mohammad Javad Eshraghi
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引用次数: 0

摘要

本研究提出了一种新的方法,通过氮化合成氮化镓纳米颗粒,并将其随后沉积到硅衬底上,利用电子束蒸发用于紫外检测。对所制备的氮化镓薄膜的结构和光学性能进行了全面表征。x射线衍射证实合成的粉末具有纤锌矿晶体结构,而沉积的薄膜具有非晶结构。场发射扫描电镜显示一层厚度约为150nm的均匀层。能量色散光谱证实,在整个涂层过程中,镓与氮的化学计量比保持不变。此外,紫外漫反射光谱测量显示,沉积薄膜的带隙为3.37 eV。此外,将金电极沉积在氮化镓薄膜上,并对光学传感器的检测性能进行了评估,其灵敏度为133.6,上升和下降时间分别为18 ms和15 ms。这些发现强调了氮化镓基材料在各个领域的先进光学传感器应用的潜力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
GaN Nanopowder synthesis via nitridation: Fabrication and characterization of GaN thin Films for UV detection applications
This study presents a novel method for synthesizing gallium nitride nanoparticles via nitridation and their subsequent deposition onto silicon substrates using electron beam evaporation for UV detection applications. The structural and optical properties of the resulting gallium nitride thin films were thoroughly characterized. X-ray diffraction confirmed that the synthesized powder has a wurtzite crystal structure, while the deposited thin film has an amorphous structure. Field emission scanning electron microscopy revealed a uniform layer with an approximate thickness of 150 nm. Energy dispersive spectroscopy confirmed that the stoichiometric ratio of gallium to nitrogen was maintained throughout the coating process. Additionally, ultraviolet diffuse reflectance spectroscopy measurements revealed a bandgap of 3.37 eV for the deposited thin film. Additionally, gold electrodes were deposited on the gallium nitride thin film, and the optical sensor's detection properties were evaluated, demonstrating a sensitivity of 133.6 along with rise and fall times of 18 ms and 15 ms, respectively. These findings underscore the potential of gallium nitride-based materials for advanced optical sensor applications in various fields.
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CiteScore
17.40
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