叶片剪切涂层制备高粘度液体微膜

IF 4.3 3区化学 Q2 CHEMISTRY, MULTIDISCIPLINARY

ACS Omega Pub Date : 2025-01-09 DOI:10.1021/acsomega.4c0890010.1021/acsomega.4c08900

Zhongping Sun, Jiaqi Zhang, Zheng Xu*, Xiaodong Wang and Yonglin Jiao,

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引用次数: 0

摘要

高粘度微膜在指定区域的分布对MEMS器件的性能和耐用性至关重要。本文提出了一种利用叶片涂布在毫/微米区域可控成膜的新方法。微膜的形成不受粘度限制，形成过程只能通过一维力传感器进行监测。对叶片-涂层过程进行了详细的动力学分析。实验结果表明，叶片间隙的初始高度是膜厚的决定因素，而膜长可以通过刮削速度单独调节，而不影响膜厚。此外，切向力在不同涂层参数下变化明显，但趋势相似。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Microfilm-Formation of High-Viscosity Liquids by Blade Shear Coating

The distribution of high-viscosity microfilms in designated regions is crucial for the performance and durability of MEMS devices. This paper presents a novel method for controllable film formation in the milli/micron region by blade coating. A microfilm can be formed without viscosity limitation, and the formation process can be monitored only via a one-dimensional force sensor. The dynamics of the blade-coating process are analyzed in detail. The experimental results indicate that the initial height of the blade gap is the determining factor of film thickness, whereas the film length can be adjusted individually by the scratching speed without influence on film thickness. Moreover, the tangential force varies obviously in different coating parameters while exhibiting a similar trend.

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来源期刊

ACS Omega Chemical Engineering-General Chemical Engineering

CiteScore

6.60

自引率

4.90%

发文量

3945

审稿时长

2.4 months

期刊介绍： ACS Omega is an open-access global publication for scientific articles that describe new findings in chemistry and interfacing areas of science, without any perceived evaluation of immediate impact.